Superconducting nanowire single photon detector (SNSPD) has been widely used in quantum communication, quantum computing and other fields because of its excellent timing jitter and response speed. However, due to the mutual restraint of the technical parameters of SNSPD nanowires, there are technical challenges to further improve the comprehensive performance of SNSPD, and thus limiting its application on a large scale. Combining high detection efficiency with high timing performance is still an outstanding challenge. In this work, we report the SNSPD with 12-μm small active area, which has high speed, high efficiency, low jitter and broadband absorption. Au/SiO2 membrane cavity, which is determined by finite element analysis simulation, is used to widen the optical response bandwidth. And it is easier to process and improve the alignment accuracy at the same time. The flat substrate is more conducive to the growth of superconducting thin films, so flattening process is introduced. Device package is also optimized to match smaller detector. Self-aligned packaging makes optical alignment more convenient and time-saving. Special optical fibers with small mode-field diameters can reduce the negative effect of the detector on optical coupling. The detector can achieve a maximum SDE of 82% at the central wavelength of 1310 nm and the temperature of 2.2 K, and the SDE of more than 65% in the wavelength range of 1200–1600 nm, with DCR of 70 cps. The detector also exhibits a count rate of 40 MHz@3 dB and a timing jitter of 38 ps, which is significantly improved compared with 23-μm active area detector. Furthermore, the minimum timing jitter of 22 ps can be obtained by using cryogenic amplifier readout. In this work, high comprehensive performance detector is developed, which provides an important technical reference for practical and product SNSPD.
Superconducting nanowire single photon detector (SNSPD) has been widely used in quantum communication, quantum computing and other fields because of its excellent timing jitter and response speed. However, due to the mutual restraint of the technical parameters of SNSPD nanowires, there are technical challenges to further improve the comprehensive performance of SNSPD, and thus limiting its application on a large scale. Combining high detection efficiency with high timing performance is still an outstanding challenge. In this work, we report the SNSPD with 12-μm small active area, which has high speed, high efficiency, low jitter and broadband absorption. Au/SiO2 membrane cavity, which is determined by finite element analysis simulation, is used to widen the optical response bandwidth. And it is easier to process and improve the alignment accuracy at the same time. The flat substrate is more conducive to the growth of superconducting thin films, so flattening process is introduced. Device package is also optimized to match smaller detector. Self-aligned packaging makes optical alignment more convenient and time-saving. Special optical fibers with small mode-field diameters can reduce the negative effect of the detector on optical coupling. The detector can achieve a maximum SDE of 82% at the central wavelength of 1310 nm and the temperature of 2.2 K, and the SDE of more than 65% in the wavelength range of 1200–1600 nm, with DCR of 70 cps. The detector also exhibits a count rate of 40 MHz@3 dB and a timing jitter of 38 ps, which is significantly improved compared with 23-μm active area detector. Furthermore, the minimum timing jitter of 22 ps can be obtained by using cryogenic amplifier readout. In this work, high comprehensive performance detector is developed, which provides an important technical reference for practical and product SNSPD.
Superconducting nanowire single photon detectors (SNSPDs) have demonstrated advantages over traditional detectors in many fields [1]. Most fiber-coupled SNSPDs are coupled to single mode fibers, limiting their usability for applications where large surface area detectors are needed, for example fluorescence detection and satellite-based quantum communication [2][3]. Other important requirements for many applications are broadband detection efficiency, and low timing jitter [4]. So far, the increased meander length of multimode detectors, and the therefore increased kinetic inductance and number of imperfections due to film inhomogeneities have limited the timing jitter [5]. Moreover, combining low timing jitter with high detection efficiency and low dark count rate in one device is challenging due to the tradeoffs between different properties of SNSPDs [6]. In this paper, we achieved high efficiency and strong saturation over a broad wavelength range with a low timing jitter of 16.99 ps while maintaining a low dark count rate of < 0.2 Hz for an SNSPD coupled to a 50 µm core multimode fiber. To enhance the broadband absorption from 405 nm to 830 nm, detectors were fabricated on an optimized SiO2 cavity and Aluminum mirror. The geometry of the nanowire was also tuned to reach a good internal saturation of efficiency over the visible/NIR range but also to carry high current to get a large signal. Furthermore, a cryogenic readout amplifier was optimized to improve the signal to noise ratio and thus lead to high time resolution. Our devices can be readily used to enable higher resolution and faster quantum optics, bio-imaging, laser ranging and other optical experiments.
Ever since superconducting nanowire single-photon detectors (SNSPDs or SSPDs) were demonstrated, they have attracted a considerable attention due to the detectors’ promising performance that includes high detection efficiency (DE), low dark count rate (DCR), broadband sensitivity, and low timing jitter. The system detection efficiency (SDE) has been improved to be over 90% with a wavelength of 1550 nm in a fiber-coupled system by embedding the SNSPD in optical cavities. However, the implementation of optical cavity usually reduces the bandwidth of SNSPDs. As a result, there are some recent works on increasing the bandwidth of SNSPD. Furthermore, the size of the active area of meandered nanowires has to be compatible with the core size of an optical fiber such that good optical coupling can be achieved; this setup requires a long nanowire with a large kinetic inductance, thus resulting in a small counting rate and a large timing jitter, particularly for multi-mode fiber-coupled devices. Nevertheless, a particularly impressive waveguide-coupled SNSPD has been developed in recent years. By placing an SNSPD atop an optical waveguide that has been fabricated on various substrate materials, photons propagating in the waveguide have been found to be evanescently absorbed by nanowires that are only a few tens of microns long. The on-chip DE of this device has been estimated to be over 90%, thus indicating that it has both high absorptance and high intrinsic DE. If the waveguide and the nanowire are correctly dimensioned, the absorptance of this device can reach over 90% for a wavelength range of more than 700 nm. Furthermore, the length of the nanowire is shorter than that of the fiber-coupled SNSPD, thus leading to a higher count rate and lower timing jitter (~18 ps). However, unsatisfactory coupling losses between the optical fiber and the waveguide in such devices can decrease its SDE (~10%), thus limiting its applicability to quantum photonic integrated circuits (QPIC). Recently, we proposed a type of SNSPD that was coupled with microfibers (MFs), and simulations for this SNSPD indicated that its absorption would be as high as 90%. Microfibers and nanofibers, tapered adiabatically from standard fibers, with diameters close to or smaller than the wavelength of the guided light were demonstrated to have low transmittance losses by Tong et al. in 2003. MFs have been shown to have many interesting properties, such as strong evanescent fields, tight optical confinement, wideband abilities, and small masses; these properties are appealing for applications such as optical sensing and coupling. MFs also provide seamless connections with high transmittance from standard fibers; therefore, MF-coupled SNSPDs can achieve both high SDEs and wideband compatibility. We proposed and demonstrated the MF-coupled SNSPDs successfully. The simulation results indicate that with optimal device structure, the optical absorption with efficiency < 90% can be realized over a wavelength range of 350 nm to 2150 nm. The fabricated MF-coupled SNSPD, shows unparalleled broadband system detection efficiencies (SDEs) of more than 50% from 630 nm to 1500 nm. The SDEs reach 66% at 785 nm and 45% at 1550 nm. These results pave the way for ultra-broadband weak light detection with quantum-limit sensitivity.
We have developed a practical superconducting nanowire single photon detector (SNSPD) system with our superconducting thin films and devices fabrication, optical coupling packaging, and cryogenic technology. The SNSPD devices were fabricated from high-quality niobium nitride (NbN) ultra-thin films that were epitaxially grown on single-crystal MgO substrates, and optical cavity structure were applied for improvement of photo absorption efficiency. The SNSPD system was developed based on a compact Gifford-McMahon (GM) cryocooler, in which SNSPD can operate continuously at temperature of 2.9 K +/- 10 mK with low power consumption without any liquid cryogens. The system detection efficiencies at 1550 nm wavelength (at a 100 Hz dark count rate) were found to be 2.6% for device without optical cavity and 21% for device with optical cavity. The response speed of devices showed maximally 200 MHz with 5 × 5 mm square device, and timing jitter of 100 ps full width at a half maximum (FWHM) was observed.
Single photon detectors are indispensable tools in optics, from fundamental measurements to quantum information processing. The ability of superconducting nanowire single photon detectors (SNSPDs) to detect single photons with unprecedented efficiency, short dead time, and high time resolution over a large frequency range enabled major advances in quantum optics. However, combining near-unity system detection efficiency (SDE) with high timing performance remains an outstanding challenge. In this work, we fabricated novel SNSPDs on membranes with 99.5−2.07+0.5% SDE at 1350 nm with 32 ps timing jitter (using a room-temperature amplifier), and other detectors in the same batch showed 94%–98% SDE at 1260–1625 nm with 15–26 ps timing jitter (using cryogenic amplifiers). The SiO2/Au membrane enables broadband absorption in small SNSPDs, offering high detection efficiency in combination with high timing performance. With low-noise cryogenic amplifiers operated in the same cryostat, our efficient detectors reach a timing jitter in the range of 15–26 ps. We discuss the prime challenges in optical design, device fabrication, and accurate and reliable detection efficiency measurements to achieve high performance single photon detection. As a result, the fast developing fields of quantum information science, quantum metrology, infrared imaging, and quantum networks will greatly benefit from this far-reaching quantum detection technology.
Fast and efficient detection of single photons with high timing accuracy is a crucial requirement in most quantum optics experiments and enables novel sensing and imaging solutions. Superconducting nanowire single-photon detectors (SNSPD) achieve technology-leading performance in terms of detection efficiency, dark count rate, timing jitter, and detector dead times. However, conventional SNSPDs with high system detection efficiency typically rely on resonant enhancement of the absorption efficiency, thus only achieving attractive detector benchmarks over narrow spectral windows. Waveguide-integrated SNSPDs allow for leveraging the wideband material absorption in superconducting nanowires by absorbing light in a traveling-wave geometry but have been limited to low system detection efficiencies due to interface losses when coupling to optical fibers. Here, we show how high system detection efficiencies of 22%–73% are realized over a broad wavelength range from 532 nm to 1640 nm in a single waveguide-integrated SNSPD device. We accomplish efficient coupling between optical fibers and waveguide-integrated nanowire detectors by employing a 3D interface, produced in direct laser writing, that relies on total internal reflection for achieving a broad transmission bandwidth. We further find low timing jitter of 25.7 ps and detector decay times of 9.8 ns, allowing for single-photon counting with high repetition rates up to 100 MHz. Our work paves the way for an efficient single-photon detector solution that combines the spectral requirements of an extremely wide range of quantum optics experiments in a single device. The coupling approach and SNSPD-integration with nanophotonic circuits are further well-suited for realizing large-scale detector arrays.
Single photon detection advanced rapidly in the last decade. The superconducting nanowire single-photon detector (SNSPD) is an emerging technology, which offers low dark count rates, broadband sensitivity from visible to mid-infrared wavelengths and very high quantum efficiency. All these features are appealing for future emerging applications in remote gas sensing, quantum key distribution and quantum information processing. By enclosing the detector in an optical cavity, tuned to the operating wavelength, the total system detection of the SNSPD is improved. Based on the cavity design, the detector absorption is boosted at the desired experimental wavelength. Devices have been fabricated and tested, in this thesis, with enhanced detection efficiency at near-infrared, infrared and mid-infrared wavelengths. NbTiN detectors fabricated on Ta2O5 / SiO2 distributed Bragg reflectors (DBR) for front-side coupling exhibit a system detection efficiency of ≈ 90% at λ = 940 nm for the best device measured. SNSPDs were also fabricated in NbTiN on metallic mirrors for back-side coupling for 1550 and 2333 nm experimental wavelengths. The first design exhibited a system detection efficiency of ≈ 84.5%, at λ = 1550 nm for the best device measured. The second exhibited low system detection efficiency since the device suffered from unexpectedly high dark count rate mainly due to blackbody radiation at 2.2 K. However, it was possible to measure the timing jitter of this device at 350 mK indicating a FWHM of 84 ps. Another technique to improve the total system detection efficiency of the SNSPD, is by fabricating a hairpin-shaped nanowire atop a single mode waveguide. In this design, photons travel through the waveguide and via evanescent coupling are absorbed in the nanowire. These SNSPD devices have been designed to thread along single mode Si ridge waveguides using a hairpin-shaped nanowire structure, which offers enhanced coupling and absorption efficiency via evanescent coupling. These ultra-thin superconducting MoSi detectors are precisely patterned on top of a single mode Si waveguide (600 nm) with alignment error less than 40 nm. Low temperature electrical and nano-optical characterization was carried out using a two-stage pulse tube (PT) coldhead, using an additional 4He / 3He sorption pump, low vibration characterization of SNSPD devices at 350 mK was carried out. Characterised devices exhibit low dark count rate <5 counts per second and timing jitter of ≈ 83 ps full width half maximum (FWHM) at wavelength (λ) = 1550 nm and at critical current ≈ 30 µA.