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Versatile microfabricated alkali vapor cells using local sealing

Vincent N. Maurice, Ravinder Chutani, Clément Carlé, Shervin Keshavarzi, Samuel Queste, Ludovic Gauthier‐Manuel, Jean-Marc Cote, Rémy Vicarini, Rodolphe Boudot, Nicolas Passilly

Published Apr 24, 2022• 0 citations
OpenAlex

Abstract

We report on a new technique to form and seal microfabricated cells that alleviates some of the limitations imposed by current solutions. The technique consists in integrating single-use sealing structures that can be actuated through laser irradiation, either to isolate cavities from each other or to connect them. Inspired by the well-established glass-blowing techniques, it reproduces on a wafer the “make-seal” and “break-seal” features found in conventional cell filling setups. By allowing cells to be evacuated, filled and sealed after having been fully-formed, this technique opens new venues for atomic devices. Here, we demonstrate both features and present one use case where alkali dispensers are used in association with non-noble gasses despite their gettering ability.

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Microfabricated alkali vapor cells using local sealing

Vincent N. Maurice, Ravinder Chutani, Clément Carlé +7 more

We report on a new technique to form and seal micro-fabricated cells. The technique consists in integrating single-use sealing structures actuated through laser irradiation, either to isolate cavities from each other or to connect them. Inspired by the glass-blowing techniques, we demonstrate “make-seals” and “break-seals” cells. This technique opens new venues for atomic devices.

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Locally sealed microfabricated vapor cells filled from an ex situ Cs source

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Microfabricated alkali vapor cells are key to enable miniature devices such as atomic clocks and optically pumped magnetometers with reduced size, weight, and power. Yet, more versatile fabrication methods are still needed to further expand their use cases. Here, we demonstrate an approach to collectively fill and seal microfabricated cesium cells using locally sealed microchannels patterned within one of the glass substrates comprising the cells. Unlike current methods that rely on wafer-level anodic bonding as the last sealing step, an approach based on local sealing opens the path to features so far limited to traditional glass-blown cells, including the ability to deposit temperature-sensitive antirelaxation coatings, reaching lower background gas pressure without an additional gettering material or filling with diverse atomic or molecular species.

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This letter reports on the generation of a tunable buffer gas mixture within microfabricated alkali vapor cells. We show that the combination of low-permeation windows with sequential openings of laser-actuated break-seals enables adjustment of a helium-neon (He-Ne) noble gas mixture, fully compatible with alkali metal dispensers. The gas reservoirs and the main cell cavities are initially sealed at the wafer level under distinct helium and neon atmospheres, respectively. Within each cell, after Cs vapor is released from the dispenser, the break-seals are successively actuated to incrementally increase the helium fraction in the buffer gas mixture. This process shifts the atomic clock frequency turnover temperature toward higher values. As an illustration, one of the fabricated cells was operated at 95$^{\circ}$C in a coherent population trapping clock, achieving a fractional frequency stability of 9$\times$10$^{-11}$ at one-day integration time. These results demonstrate the feasibility of precisely tuning buffer gas compositions in microfabricated vapor cells and support the suitability of He-Ne mixtures for miniature atomic clock applications.

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Wafer-level fabrication of alkali vapor cells using in-situ atomic deposition

Doug Bopp, Vincent N. Maurice, John E. Kitching

Abstract We demonstrate a new technique for filling mm-scale microfabricated silicon and glass cavities with alkali vapors at the wafer-scale. A single etched silicon wafer contains an array of cavities containing alkali precursor materials offset laterally from the cell array. The wafer is heated to create an array of alkali droplets on an upper glass wafer, which is then translated laterally under vacuum and bonded to create the cells. This technique can be implemented in a commercially available bonding tool, allows the fabrication of cells with arbitrary buffer gas contents and pressures and can potentially produce cells with dimensions below 100 µm.

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Integrating alkali atomic vapors with nanophotonic devices offers a scalable route to quantum technologies that leverage strong atom–photon interactions. While there have been many approaches to such integration, the general reliance on traditional glass vapor cells, distilled alkali metals, and epoxy sealing limits reproducibility and scalability. Moreover, mitigating adverse Rb-photonics interactions is essential, particularly as devices become more compact and the alkali source lies in close proximity to the photonic elements. Here, we demonstrate the successful operation of compact and fully integrated devices that combine silicon nitride photonic integrated circuits (PICs) with microfabricated borosilicate vapor cells and pill-type rubidium (Rb) dispensers through hermetic seals via anodic bonding. We show how successful operation hinges on optically activating the dispenser in a low-power pulsed mode, releasing controlled amounts of Rb vapor on demand while mitigating photonic degradation. Simultaneously, a counter-propagating desorption laser completely suppresses Rb-induced losses and enables waveguide-based atomic vapor spectroscopy. Using this approach, we demonstrate repeatable control of vapor density by tuning activation pulse length, duty cycle, and device temperature. These results establish a compact, manufacturable, and scalable vapor–PIC device, and set the stage for future demonstrations in cavity quantum electrodynamics, quantum nonlinear optics, and chip-scale atomic sensors.

Optica Quantum•Mar 17, 2026•3 citations

Enabling atom-clad waveguide operation in a microfabricated alkali vapor-photonic integrated circuit

Rahul Shrestha, Khoi Tuan Hoang, Peter Riley +5 more

Integrating alkali atomic vapors with nanophotonic devices offers a scalable route to quantum technologies that leverage strong atom-photon interactions. While there have been many approaches to such integration, the general reliance on traditional glass vapor cells, distilled alkali metals, and epoxy sealing limits reproducibility and scalability. Moreover, mitigating adverse Rb-photonics interactions is essential, particularly as devices become more compact and the alkali source lies in close proximity to the photonic elements. Here, we demonstrate the successful operation of compact and fully integrated devices that combine silicon nitride photonic integrated circuits (PICs) with microfabricated borosilicate vapor cells and pill-type rubidium (Rb) dispensers through hermetic seals via anodic bonding. We show how successful operation hinges on optically activating the dispenser in a low-power pulsed mode, releasing controlled amounts of Rb vapor on demand while mitigating photonic degradation. Simultaneously, a counter-propagating desorption laser completely suppresses Rb-induced losses and enables waveguide-based atomic vapor spectroscopy. Using this approach, we demonstrate repeatable control of vapor density by tuning activation pulse length, duty cycle, and device temperature. These results establish a compact, manufacturable, and scalable vapor-PIC device, and set the stage for future demonstrations in cavity quantum electrodynamics, quantum nonlinear optics, and chip-scale atomic sensors.

arXiv:2512.19852•Dec 22, 2025•0 citations
We report on a new technique to form and seal microfabricated cells that alleviates some of the limitations imposed by current solutions. The technique consists in integrating single-use sealing structures that can be actuated through laser irradiation, either to isolate cavities from each other or to connect them. Inspired by the well-established glass-blowing techniques, it reproduces on a wafer the “make-seal” and “break-seal” features found in conventional cell filling setups. By allowing cells to be evacuated, filled and sealed after having been fully-formed, this technique opens new venues for atomic devices. Here, we demonstrate both features and present one use case where alkali dispensers are used in association with non-noble gasses despite their gettering ability.
Microfabricated alkali vapor cells are key to enable miniature devices such as atomic clocks and optically pumped magnetometers with reduced size, weight, and power. Yet, more versatile fabrication methods are still needed to further expand their use cases. Here, we demonstrate an approach to collectively fill and seal microfabricated cesium cells using locally sealed microchannels patterned within one of the glass substrates comprising the cells. Unlike current methods that rely on wafer-level anodic bonding as the last sealing step, an approach based on local sealing opens the path to features so far limited to traditional glass-blown cells, including the ability to deposit temperature-sensitive antirelaxation coatings, reaching lower background gas pressure without an additional gettering material or filling with diverse atomic or molecular species.
This letter reports on the generation of a tunable buffer gas mixture within microfabricated alkali vapor cells. We show that the combination of low-permeation windows with sequential openings of laser-actuated break-seals enables adjustment of a helium-neon (He-Ne) noble gas mixture, fully compatible with alkali metal dispensers. The gas reservoirs and the main cell cavities are initially sealed at the wafer level under distinct helium and neon atmospheres, respectively. Within each cell, after Cs vapor is released from the dispenser, the break-seals are successively actuated to incrementally increase the helium fraction in the buffer gas mixture. This process shifts the atomic clock frequency turnover temperature toward higher values. As an illustration, one of the fabricated cells was operated at 95∘^{\circ}∘C in a coherent population trapping clock, achieving a fractional frequency stability of 9$\times101010^{-11}$ at one-day integration time. These results demonstrate the feasibility of precisely tuning buffer gas compositions in microfabricated vapor cells and support the suitability of He-Ne mixtures for miniature atomic clock applications.
Abstract We demonstrate a new technique for filling mm-scale microfabricated silicon and glass cavities with alkali vapors at the wafer-scale. A single etched silicon wafer contains an array of cavities containing alkali precursor materials offset laterally from the cell array. The wafer is heated to create an array of alkali droplets on an upper glass wafer, which is then translated laterally under vacuum and bonded to create the cells. This technique can be implemented in a commercially available bonding tool, allows the fabrication of cells with arbitrary buffer gas contents and pressures and can potentially produce cells with dimensions below 100 µm.
Integrating alkali atomic vapors with nanophotonic devices offers a scalable route to quantum technologies that leverage strong atom–photon interactions. While there have been many approaches to such integration, the general reliance on traditional glass vapor cells, distilled alkali metals, and epoxy sealing limits reproducibility and scalability. Moreover, mitigating adverse Rb-photonics interactions is essential, particularly as devices become more compact and the alkali source lies in close proximity to the photonic elements. Here, we demonstrate the successful operation of compact and fully integrated devices that combine silicon nitride photonic integrated circuits (PICs) with microfabricated borosilicate vapor cells and pill-type rubidium (Rb) dispensers through hermetic seals via anodic bonding. We show how successful operation hinges on optically activating the dispenser in a low-power pulsed mode, releasing controlled amounts of Rb vapor on demand while mitigating photonic degradation. Simultaneously, a counter-propagating desorption laser completely suppresses Rb-induced losses and enables waveguide-based atomic vapor spectroscopy. Using this approach, we demonstrate repeatable control of vapor density by tuning activation pulse length, duty cycle, and device temperature. These results establish a compact, manufacturable, and scalable vapor–PIC device, and set the stage for future demonstrations in cavity quantum electrodynamics, quantum nonlinear optics, and chip-scale atomic sensors.
Integrating alkali atomic vapors with nanophotonic devices offers a scalable route to quantum technologies that leverage strong atom-photon interactions. While there have been many approaches to such integration, the general reliance on traditional glass vapor cells, distilled alkali metals, and epoxy sealing limits reproducibility and scalability. Moreover, mitigating adverse Rb-photonics interactions is essential, particularly as devices become more compact and the alkali source lies in close proximity to the photonic elements. Here, we demonstrate the successful operation of compact and fully integrated devices that combine silicon nitride photonic integrated circuits (PICs) with microfabricated borosilicate vapor cells and pill-type rubidium (Rb) dispensers through hermetic seals via anodic bonding. We show how successful operation hinges on optically activating the dispenser in a low-power pulsed mode, releasing controlled amounts of Rb vapor on demand while mitigating photonic degradation. Simultaneously, a counter-propagating desorption laser completely suppresses Rb-induced losses and enables waveguide-based atomic vapor spectroscopy. Using this approach, we demonstrate repeatable control of vapor density by tuning activation pulse length, duty cycle, and device temperature. These results establish a compact, manufacturable, and scalable vapor-PIC device, and set the stage for future demonstrations in cavity quantum electrodynamics, quantum nonlinear optics, and chip-scale atomic sensors.