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Bulletin of the American Physical Society

Improvement in Superconducting Resonator Quality Factor Through Surface Passivation

Cassidy Berk, Archan Banerjee, Ahmed Hajr, John Mark Kreikebaum, Virginia Altoé, David Santiago, D. Frank Ogletree, Irfan A. Siddiqi

Published Mar 19, 2021• 1 citation
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Applied Physics Letters•Sep 7, 2026•0 citations
Tantalum is a promising platform for superconducting quantum circuits, yet coherence times remain limited by dielectric losses from interfacial two-level systems (TLS), exacerbated by native oxide regrowth. Here, we implement molecular surface passivation using self-assembled organic monolayers on freshly etched tantalum and silicon in coplanar waveguide resonators. Surface characterization by contact angle, XPS, FTIR and TEM confirm the formation of ordered, nanometer-thick films that suppress oxide formation. Microwave measurements in the ~5-9 GHz range reveal internal quality factors up to 1.8x10^6 in the single-photon regime at 100 mK, representing a ~140% improvement over untreated devices with native oxide. Power and temperature dependent measurements attribute this enhancement to reduced TLS-induced losses. These results demonstrate that molecular passivation effectively engineers low-loss interfaces and provides a scalable route toward high-coherence superconducting quantum devices.
Native oxide formation (NbOx) at the niobium (Nb) metal–air interface is a source of microwave loss and performance variability in superconducting resonators. We introduce vapor-phase hexamethyldisilazane (HMDS) as a dry surface passivation treatment compatible with standard nanofabrication workflows. In five independent fabrication runs, HMDS-passivated resonators consistently demonstrate improved internal quality factor (Qi) and narrower performance distribution relative to paired unpassivated controls. The Qi improvement occurs across the full microwave power range, suggesting NbOx suppression as a contributing mechanism. Statistical depth profile analysis of Nb oxidation state by electron energy loss spectroscopy corroborates this mechanism, revealing smaller chemical shifts and shallower oxidation depth in passivated specimens relative to the control. Furthermore, re-measurement after 60 days of ambient storage shows that HMDS-passivated resonators retain their Qi, indicating their ambient stability. These results establish vapor-phase HMDS as a surface passivation strategy with strong potential for superconducting quantum devices.