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Bulletin of the American Physical Society

Fabrication of Transmon Qubits with Molecular-Beam Epitaxy Aluminum

Yizhou Huang, F. C. Wellstood, Christopher J. K. Richardson, B. S. Palmer

Published Mar 19, 2021• 0 citations
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Study of the effects of surface cladding on 3D transmon

Zachary Yoscovits

Quantum computing is a very interesting field, due to the ability of quantum computers to solve many problems much faster than a classical computer. Superconducting qubits are electronic circuits composed of superconducting capacitors, inductors and Josephson junctions, which can implement a physical qubit. However they need improvements in their coherence time to create a viable quantum computing. In this work I study the effect on decoherence caused by two level systems in the native oxide that forms on the surface of qubit. To this end I fabricate 3D transmon qubits using materials grown my molecular beam epitaxy, to which a variety of different surface treatments had been applied. I began by fabricating qubits from niobium/aluminum oxide/niobium trilayers. To this end I developed a self-aligned process for fabricating sub-micron Josephson junctions. This process presented many challenges. During the development of this process, it became clear that niobium was an inferior material for fabricating qubits compared to aluminum. I then switched to making qubits from Aluminum. I began by studying the growth of aluminum on sapphire, and was able to achieve aluminum films with an RMS roughness of 0.2 nm by growing on c-plane sapphire that had been annealed in oxygen at 1100 °C and dipped in BOE. Next I fabricated 3D transmon qubits by adapting the standard shadowmask process for use with MBE. I fabricated qubits with a long in situ oxidation to fully passivate the surface before exposure to air. I also passivated the surface by means of growing co deposited aluminum oxide, and by grown aluminum nitride using a nitrogen plasma source. The coherence times of these qubits were compared to those a control sample that had been exposed to air immediately after growth. Overall it doesn’t appear that cladding the surface changes the coherence time much, however it is difficult to form conclusions with this small sample size. The coated samples appeared to have slightly longer coherence times than the untreated samples, with diffusive oxidation and coating with aluminum oxide providing the largest increase in T1 and diffusive oxidation providing the largest increase in T2.

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We assess independently the impact of high-temperature substrate annealing and metal deposition conditions on the coherence of transmon qubits in the standard 2D circuit-QED architecture. We restrict our study to devices made with aluminum interdigital capacitors on sapphire substrates. We record more than an order-of-magnitude improvement in the relaxation time of devices made with an annealed substrate, independent of whether a conventional evaporator or molecular beam epitaxy chamber was used to deposit the aluminum. We also infer similar levels of flux noise and photon shot noise through dephasing measurements on these devices. Our results indicate that substrate annealing plays a primary role in fabricating low-loss qubits, consistent with the hypothesis that substrate-air and substrate-metal interfaces are essential factors limiting the qubit lifetimes in superconducting circuits.

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I hereby declare that I am the sole author of this thesis. This is a true copy of the thesis, including any required final revisions, as accepted by my examiners. I understand that my thesis may be made electronically available to the public. ii The growth of Aluminum (Al) on semiconductors and dielectrics is a cornerstone in the quest for scalable quantum computing systems. Indeed the electrical properties of Al make it an exceptional candidate for the realization of superconducting resonators, pivotal tools for understanding and operating superconducting qubits. Such resonators have been fabricated recently on Sapphire substrates, using Molecular Beam Epitaxy (MBE), and displayed quality factors above a million. Complementary studies of these resonators have demonstrated that the metal-substrate interface was the primary source of decoherence and losses, highlighting the importance of pristine interfaces (free of contaminants), and high quality epitaxial growth in order to minimize the native defects level. In this work we investigate different substrate materials in order to yield equivalent or higher qual-

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Materials Effects in 3D-Cavity Transmon Qubits

Daniela F. Bogorin, Matthew Ware, Stephen Sorokanich +1 more

Bulletin of the American Physical Society•Mar 18, 2013•0 citations
Quantum computing is a very interesting field, due to the ability of quantum computers to solve many problems much faster than a classical computer. Superconducting qubits are electronic circuits composed of superconducting capacitors, inductors and Josephson junctions, which can implement a physical qubit. However they need improvements in their coherence time to create a viable quantum computing. In this work I study the effect on decoherence caused by two level systems in the native oxide that forms on the surface of qubit. To this end I fabricate 3D transmon qubits using materials grown my molecular beam epitaxy, to which a variety of different surface treatments had been applied. I began by fabricating qubits from niobium/aluminum oxide/niobium trilayers. To this end I developed a self-aligned process for fabricating sub-micron Josephson junctions. This process presented many challenges. During the development of this process, it became clear that niobium was an inferior material for fabricating qubits compared to aluminum. I then switched to making qubits from Aluminum. I began by studying the growth of aluminum on sapphire, and was able to achieve aluminum films with an RMS roughness of 0.2 nm by growing on c-plane sapphire that had been annealed in oxygen at 1100 °C and dipped in BOE. Next I fabricated 3D transmon qubits by adapting the standard shadowmask process for use with MBE. I fabricated qubits with a long in situ oxidation to fully passivate the surface before exposure to air. I also passivated the surface by means of growing co deposited aluminum oxide, and by grown aluminum nitride using a nitrogen plasma source. The coherence times of these qubits were compared to those a control sample that had been exposed to air immediately after growth. Overall it doesn’t appear that cladding the surface changes the coherence time much, however it is difficult to form conclusions with this small sample size. The coated samples appeared to have slightly longer coherence times than the untreated samples, with diffusive oxidation and coating with aluminum oxide providing the largest increase in T1 and diffusive oxidation providing the largest increase in T2.
We assess independently the impact of high-temperature substrate annealing and metal deposition conditions on the coherence of transmon qubits in the standard 2D circuit-QED architecture. We restrict our study to devices made with aluminum interdigital capacitors on sapphire substrates. We record more than an order-of-magnitude improvement in the relaxation time of devices made with an annealed substrate, independent of whether a conventional evaporator or molecular beam epitaxy chamber was used to deposit the aluminum. We also infer similar levels of flux noise and photon shot noise through dephasing measurements on these devices. Our results indicate that substrate annealing plays a primary role in fabricating low-loss qubits, consistent with the hypothesis that substrate-air and substrate-metal interfaces are essential factors limiting the qubit lifetimes in superconducting circuits.
I hereby declare that I am the sole author of this thesis. This is a true copy of the thesis, including any required final revisions, as accepted by my examiners. I understand that my thesis may be made electronically available to the public. ii The growth of Aluminum (Al) on semiconductors and dielectrics is a cornerstone in the quest for scalable quantum computing systems. Indeed the electrical properties of Al make it an exceptional candidate for the realization of superconducting resonators, pivotal tools for understanding and operating superconducting qubits. Such resonators have been fabricated recently on Sapphire substrates, using Molecular Beam Epitaxy (MBE), and displayed quality factors above a million. Complementary studies of these resonators have demonstrated that the metal-substrate interface was the primary source of decoherence and losses, highlighting the importance of pristine interfaces (free of contaminants), and high quality epitaxial growth in order to minimize the native defects level. In this work we investigate different substrate materials in order to yield equivalent or higher qual-