Matrix of Integrated Superconducting Single-Photon Detectors With High Timing Resolution
Carsten Schuck, Wolfram H. P. Pernice, Olga V. Minaeva, Mo Li, Er V. Sergienko, Hong X. Tang
Abstract
Abstract—We demonstrate a large grid of individually ad-dressable superconducting single photon detectors on a single chip. Each detector element is fully integrated into an inde-pendent waveguide circuit with custom functionality at telecom wavelengths. High device density is achieved by fabricating the nanowire detectors in traveling wave geometry directly on top of silicon-on-insulator waveguides. Our superconducting single photon detector matrix includes detector designs optimized for high detection efficiency, low dark count rate, and high timing accuracy. As an example, we exploit the high timing resolution of a particularly short nanowire design to resolve individual photon round-trips in a cavity ring-down measurement of a silicon ring resonator. Index Terms—Optical waveguides, quantum computing, silicon on insulator technology, superconducting photodetectors. I.