Quantum computing is a powerful way of improving computing efficiency. For some specific problems, quantum processor can exponentially reduce computation time compared to the classical computer. Cavity quantum electrodynamics, which studies the coherent interaction between photons in an optical cavity and atoms or other two-level systems, is of enormous significance to quantum computing and quantum information processing. The strong coupling regime where a cavity photon mode and an atom exchange a single quantum energy coherently has attracted extensive interest in varied experimental platforms and systems such as alkali atoms, Rydberg atoms, large spin ensembles, magnons, etc. The semiconductor gate-defined double quantum dot (DQD) system is one of the most promising platforms that possesses advantages of advanced micro-nano processing technology and outstanding scalability. Introducing the concept of cavity QED into superconducting circuits (circuit QED, cQED), provides an opportunity to study interaction between electrons confined in semiconductor DQD and photons trapped in a superconducting resonator. Reaching strong coupling regime in this hybrid system paves the way to large-scale network of quantum computing. Electrons confined in DQD have large electrical dipoles, thus are able to couple to photons with relatively large coupling rate. Whereas, due to the charge noise and other dissipation channels in the hybrid system, the decoherence rate of the system is larger than the coupling rate, leaving the strong coupling a great challenge. In recent years, different methods have been proposed to access the strong coupling regime. Taking advantage of a high-quality heterojunction structure, an overlapping gate architecture and a low-pass LC filter on the DC bias line, the decoherence of the charge qubit and microwave leakage of the resonator can be effectively suppressed. The coupling strength of the hybrid system can be improved utilizing a high impedance resonator which is comprised of high kinetic inductance materials. Spin, which does not interact directly with the electric field, is insensitive to charge noise and has much longer decoherence time than charge qubit. However, the weak interaction results in a small coupling rate between the spin and the photon. To solve this problem, the method of coherent hybridization between the spin and the charge state is proposed to improve the coupling strength. This hybridization can be achieved by applying a non-uniform magnetic field, utilizing spin-orbit interaction or spin exchange interaction. At present, both charge qubits and spin qubits have achieved strong coupling with the cavity and the coupling distance between long-range qubits is greatly expanded as long as millimeters. This review introduces basic ideas about cQED and fundamental elements in semiconductor cQED systems. Recent progress in strong coupling hybrid system and methods for improving coupling structures are discussed. In future research, more efforts will be devoted into long-range transfer of qubit states and photon-mediated two or multi-qubit gates.
Quantum computing is a powerful way of improving computing efficiency. For some specific problems, quantum processor can exponentially reduce computation time compared to the classical computer. Cavity quantum electrodynamics, which studies the coherent interaction between photons in an optical cavity and atoms or other two-level systems, is of enormous significance to quantum computing and quantum information processing. The strong coupling regime where a cavity photon mode and an atom exchange a single quantum energy coherently has attracted extensive interest in varied experimental platforms and systems such as alkali atoms, Rydberg atoms, large spin ensembles, magnons, etc. The semiconductor gate-defined double quantum dot (DQD) system is one of the most promising platforms that possesses advantages of advanced micro-nano processing technology and outstanding scalability. Introducing the concept of cavity QED into superconducting circuits (circuit QED, cQED), provides an opportunity to study interaction between electrons confined in semiconductor DQD and photons trapped in a superconducting resonator. Reaching strong coupling regime in this hybrid system paves the way to large-scale network of quantum computing. Electrons confined in DQD have large electrical dipoles, thus are able to couple to photons with relatively large coupling rate. Whereas, due to the charge noise and other dissipation channels in the hybrid system, the decoherence rate of the system is larger than the coupling rate, leaving the strong coupling a great challenge. In recent years, different methods have been proposed to access the strong coupling regime. Taking advantage of a high-quality heterojunction structure, an overlapping gate architecture and a low-pass LC filter on the DC bias line, the decoherence of the charge qubit and microwave leakage of the resonator can be effectively suppressed. The coupling strength of the hybrid system can be improved utilizing a high impedance resonator which is comprised of high kinetic inductance materials. Spin, which does not interact directly with the electric field, is insensitive to charge noise and has much longer decoherence time than charge qubit. However, the weak interaction results in a small coupling rate between the spin and the photon. To solve this problem, the method of coherent hybridization between the spin and the charge state is proposed to improve the coupling strength. This hybridization can be achieved by applying a non-uniform magnetic field, utilizing spin-orbit interaction or spin exchange interaction. At present, both charge qubits and spin qubits have achieved strong coupling with the cavity and the coupling distance between long-range qubits is greatly expanded as long as millimeters. This review introduces basic ideas about cQED and fundamental elements in semiconductor cQED systems. Recent progress in strong coupling hybrid system and methods for improving coupling structures are discussed. In future research, more efforts will be devoted into long-range transfer of qubit states and photon-mediated two or multi-qubit gates.
Semiconductor qubits rely on the control of charge and spin degrees of freedom of electrons or holes confined in quantum dots (QDs). Typically, semiconductor qubit-qubit coupling is short range, effectively limiting qubit distance to the spatial extent of the wavefunction of the confined particle (a few hundred nanometers). This is a significant constraint towards scaling of QD-based architectures to realize dense 1D or 2D arrays of QDs. Inspired by techniques originally developed for circuit QED, we recently demonstrated the strong coupling of individual electrons confined in GaAs quantum dots to individual microwave photons, making use of the enhanced electric component of the vacuum fluctuations of a resonator with impedance beyond the typical 50 Ohm of standard coplanar waveguides. In this hybrid technology, we recently realized a proof of concept experiment, where the coupling between a transmon and a double QD (DQD) is mediated by virtual microwave photon excitations in a high impedance SQUID array resonator, which acts as a quantum bus enabling long-range coupling between dissimilar qubits. Similarly, we achieved coherent coupling between two DQD charge qubits separated by approximately 50 um. In the dispersive regime, we spectroscopically observed qubit-qubit coupling as an avoided-crossing in the energy spectrum of the DQD charge qubits. The methods and techniques developed in this work are transferable to QD devices based on other material systems and can be beneficial for spin based hybrid systems.
Coherent and strong coupling between photons and solid-state qubits, in the form of circuit quantum electrodynamics (QED), has been harnessed for two-qubit gates mediated by photons and high-fidelity quantum non-demolition readout, which are the building blocks of large-scale quantum computation. Recently, circuit QED has been extended to gate-defined semiconductor quantum dots. In this thesis, we develop a novel hybrid circuit QED architecture composed of a high-impedance superconducting microwave resonator and spins localized in silicon-MOS quantum dots. To control and measure the spin degrees of freedom, this hybrid system needs to operate at finite magnetic field. Consequently, we develop and characterize microwave resonators based on thin niobium nitride (NbN) films featuring a high kinetic inductance. We demonstrate high-impedance resonators with magnetic field resilience and low photon loss rates. We then co-integrate the NbN resonators on silicon spin qubit chips. With a hole confined in a double quantum dot (DQD), we report the first realization of a strong hole charge-photon interaction bordering the ultra-strong coupling regime. At finite magnetic field, putting the spin transition energy in resonance with the microwave cavity, we observe large vacuum Rabi mode splittings, signature of a strong spin-photon coupling. Our findings are well captured by the modelling of a hole DQD with different anisotropic Zeeman response in each dot and spin-orbit coupling dependent tunnel rates. We also find a sizeable spin-photon coupling when the hole is localized in the single quantum dot, in line with recent theoretical predictions. The different works presented in this manuscript pave the way for circuit QED with hole spins in gate-defined semiconductor quantum dots.
This thesis investigates hybrid circuit quantum electrodynamics (cQED) as a versatile platform that unites superconducting resonators with semiconductor quantum dots. The central motivation is to harness strong light-matter coupling at the single-photon level, which enables coherent photon-qubit interactions and paves the way for quantum technologies in computation, communication, and sensing. The first part of this work combines hybrid cQED with holes in planar Ge/SiGe, a material system that has only recently become accessible for quantum devices. Planar Ge offers unique advantages for this purpose and has attracted considerable attention in the context of quantum computing. In contrast, its potential for hybrid cQED has remained largely unexplored, making the present work one of the first demonstrations of strong light-matter interaction in this platform. Within this framework, we demonstrate strong charge-photon coupling in planar Ge by observing vacuum Rabi splitting between a hole charge qubit based on a double quantum dot (DQD) and a microwave resonator. We employ a frequency-tunable high-impedance resonator to perform qubit spectroscopy, enabling systematic exploration of coupling regimes and confirming device controllability. In addition, we use this setup to carry out excited-state spectroscopy of strongly correlated states in the DQD, revealing the formation of Wigner molecules and illustrating how the hybrid architecture can be harnessed to access many-body physics. While these experiments in Ge demonstrate how strong coupling can be harnessed to explore qubit physics and correlated states, they also exemplify the wider potential of hybrid cQED. A particularly pressing application is in quantum optics, where efficient single-photon detectors are still lacking in the microwave regime. Such detectors are essential for enabling experiments in quantum communication and microwave quantum optics. In the second part of this thesis, we address this challenge by realizing a photodetector based on a GaAs DQD coupled to a superconducting resonator. The detector operates via photon-to-charge conversion and achieves efficiencies approaching unity. Strong coupling plays a central role by ensuring that incoming photons are absorbed before being lost to the environment, which is key to the high performance of the detector. We further exploit the frequency tunability of the resonator to investigate device performance and identify the parameters that optimize detection efficiency. The broader impact of this work lies in advancing quantum technologies that rely on coherent microwave photons. Applications include spin qubit readout, long-distance photon-mediated coupling, quantum communication, and microwave quantum optics. Looking forward, planar Ge is identified as a highly competitive platform for hybrid cQED. Future directions include the development of single-photon sources, quantum- limited detectors, and analog quantum simulators based on engineered resonator-qubit arrays.
Hybrid circuit quantum electrodynamics (cQED) aims at coupling various quantum degrees of freedom, among which are spin and charge degrees of freedom in gate defined quantum dots, phonons or magnons... with quantized electromagnetic fields in superconducting microwave cavities to investigate fundamental physics questions or for quantum computation and simulation. However, low microwave losses, key for many hybrid cQED experiments, are challenging to achieve given the often exotic and/or complex material stacks (e.g. semiconducting material, ferromagnets, or piezoelectric materials) required to host the various quantum degrees of freedom. In this work, we present a 3D-integration process to overcome this challenge for semi-industrial silicon MOS spin qubits. The process is based on dense indium bump interconnects at a pitch of 10 μm and superconducting thin films of Niobium Nitride (NbN). First, we report on DC and RF interconnect properties that demonstrate a high galvanic interconnection yield and internal quality factors above 105 in the single photon regime for NbN resonators interrupted by a single indium bump interconnect. Eventually, we fabricated a 3D-integrated hybrid circuit quantum electrodynamics (cQED) device based on a semi-industrial MOS hole double quantum dot and a high impedance NbN resonator. For this device, we report a cavity internal quality factor above 10000 and demonstrate record sensitivity for gate-based dispersive readout of the charge degree of freedom with an SNR of 100 in 300 ns. Finally, we demonstrate strong spin-photon coupling of gs/2π = 75 MHz, which highlights the viability of 3D-integration for quantum dot based hybrid spin circuit quantum electrodynamics and opens to high-fidelity spin readout and microwave photon-based remote spin qubit entanglement.
One of the key elements in circuit quantum electrodynamics (cQED) is the superconducting microwave resonator, which can enable strong coupling to and between nanoscale quantum systems, and as a result has emerged as an essential tool for both quantum information and quantum sensing. In this thesis, I will discuss new applications of superconducting resonators in both of these fields, which illustrates how quantum information and quantum sensing can be strongly tied together. As the field of quantum information continues to grow, various platforms for realizing a quantum computer have been proposed. One attractive platform is to control and manipulate the spin of an electron to form spin qubits, which have demonstrated a long coherence time, weak coupling to the environment, and high fidelity single- and two-qubit gates. However, scaling beyond two qubits has proven challenging, as has incorporating long-range coupling, although both are crucial for making spin qubits a scalable quantum computing platform. The confinement of electromagnetic fields in superconducting resonators enables strong coupling to small systems, such as the single electrons of a spin qubit. In the first part of this thesis, I will describe how a singlet-triplet spin qubit coupled to a high-impedance superconducting resonator constitutes a promising architecture for mediating long-ranged interactions based on a longitudinal coupling between the resonator and qubit. I will discuss the technical developments needed to successfully implement this novel type of interaction in a hybrid spin qubit-resonator device. This type of interaction has several advantages over the more commonly studied transverse coupling scheme: it does not require careful tuning of the qubit frequency to match that of the resonator, which facilitates scaling to a large number of qubits, and also avoids the loss of coherence, which is inevitable in resonant coupling. This type of interaction therefore opens promising paths for generating high-fidelity long-ranged two-qubit coupling by employing superconducting microwave resonators. By adapting techniques used in quantum information, we have also developed a new technique in quantum sensing, where we employ superconducting resonators as a probe of quantum materials such as mesoscopic systems, two-dimensional materials, and heterostructures, which are otherwise challenging to experimentally access with conventional techniques. In the second part of my thesis, I will discuss how implementing cQED techniques from quantum information allows us to probe the symmetry of the order parameter in unconventional superconductors. Unconventional superconductors are not readily available, and we therefore study an engineered system that comprises of interfacing a ferromagnet and superconductor, in which unconventional pairing can be induced into the ferromagnet. This platform allows us to simultaneously excite spin waves, a collective excitation of spins, in the ferromagnet, which opens new directions for studying interactions between coherently coupled magnons (quanta of spin waves) and unconventional superconducting states. Finally, by applying the same technique to a two-dimensional (2D) superconductor, tungsten ditelluride, we leverage this platform in an attempt to study the order parameter of its intrinsic superconducting phase. The nature of the order parameter in this material remains an open question, as both topological and superconducting phases can exist, possibly simultaneously. This work thus demonstrates a unique use of superconducting resonators beyond quantum information applications.
Spin qubits in semiconductor quantum dots constitute one of the leading platforms for quantum information processing, combining long coherence times, high-fidelity gate operations, and compatibility with semiconductor industry technologies. In particular, holes confined in planar Ge/SiGe heterostructures have recently emerged as promising qubit candidates owing to their low effective mass, high mobility, low percolation density, absence of valley states, and strong spin-orbit interaction, which enables fast all-electrical spin control. At the same time, spin-orbit interaction also gives rise to a highly anisotropic and electrically tunable gyromagnetic response. Understanding and controlling this response is therefore essential for high-fidelity single- and multi-qubit operations. The realization of scalable quantum processors also requires efficient qubit readout and long-range connectivity. Circuit quantum electrodynamics (cQED), based on the coupling between artificial atoms and microwave photons confined in superconducting resonators, provides a natural framework to address these challenges. However, the implementation of hybrid semiconductor-superconductor devices in planar Ge has so far been hindered by large microwave losses originating from the heterostructure. In this thesis, we demonstrate, for the first time in planar Ge, strong coupling between a hole charge qubit in a double quantum dot and a high-impedance microwave resonator, reaching a cooperativity of C â 100. In addition, we leverage the frequency tunability of the resonator to perform detailed spectroscopy of a multi-level energy spectrum of low-lying states arising from strong Coulomb-correlation effects. To further improve the quality of the hole-photon interface, we investigate the source of microwave losses in different Ge/SiGe heterostructures, identifying defects at the lattice-mismatched Si/Ge interface as the dominant source of resonator losses in reverse-graded heterostructures. To mitigate this limitation, a deep tapered-etching approach is introduced, enabling the fabrication of superconducting resonators directly on etched heterostructures. This method yields internal quality factors exceeding Qint > 10 000 for high-impedance Josephson junction array resonators and Qint > 100 000 for 50 â Nb resonators. Finally, this thesis explores the spin properties of multi-hole quantum dots beyond the conventional single-orbital picture. By reconstructing and electrically tuning the g tensors of holes confined in different orbital states, we show that confinement can substantially modify both their magnitude and orientation. These results open new opportunities for engineering qubit properties through orbital occupation. Furthermore, highly coherent singlet-triplet oscillations are demonstrated in the seven-hole regime, yielding a quality factor of approximately 330 at in-plane magnetic fields as low as 2.5 mT. Together, these results establish a foundation for high-fidelity hole-spin-qubit operation based on g-tensor engineering and for the integration of planar Ge quantum dots with superconducting quantum circuits.