The destruction rates of the xenon $6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{0}$ metastable and $6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{1}$ resonance atoms by collisions with ground-state xenon atoms have been measured by studying the temporal dependence of the number densities of the $6{s}^{\ensuremath{'}}$ and
6p atoms. The studies have been made both during the earlier afterglow of a xenon pulsed discharge and after the selective production of the $6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{0,1}$ atoms by a laser excitation in the late afterglow. An original optical pumping technique, using a tunable pulsed dye laser, was employed to populate the $6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{0,1}$ levels by excitation of the
6s[23]2 long-lived metastable atoms to $6{p}^{\ensuremath{'}}$ levels. The pressure dependence of the decay frequencies of these $6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{0,1}$ atoms was analyzed in the xenon pressure range of 0.04 to 1 torr and a kinetic model describing the evolution of the densities of these atoms after their production was established. The rate coefficients for the relaxation of the $6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{0}$ metastable and $6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{1}$ resonance atoms by two-body collisions involving a ground-state xenon atom are (8.45\ifmmode\pm\else\textpm\fi{}0.85) \ifmmode\times\else\texttimes\fi{} ${10}^{\ensuremath{-}12}$
cm3 ${\mathrm{sec}}^{\ensuremath{-}1}$ and (6.65 \ifmmode\pm\else\textpm\fi{} 1.00) \ifmmode\times\else\texttimes\fi{} ${10}^{\ensuremath{-}11}$
cm3 ${\mathrm{sec}}^{\ensuremath{-}1}$, respectively. Results show that, in fact, at least 75% of this relaxation is a transfer of population to the
6p[21]1 level following ${\mathrm{Xe}}^{*}(6{s}^{\ensuremath{'}}{[\frac{1}{2}]}_{0,1})+\mathrm{Xe}\ensuremath{\rightleftarrows}{\mathrm{Xe}}^{*}(6p{[\frac{1}{2}]}_{1})+\mathrm{Xe}\ensuremath{-}\ensuremath{\Delta}E$. These collisional transfer processes have been explained by means of Mulliken's xenon molecular potential curves.
The wide range of applications using metastable noble gas atoms has led to a number of different approaches for producing large metastable state densities. Here we investigate a recently proposed hybrid approach that combines RF discharge techniques with optical pumping from an auxiliary state in xenon. We study the effect of xenon pressure on establishing initial population in both the auxiliary state and metastable state via the RF discharge, and the role of the optical pumping beam power in transferring population between the states. We find experimental conditions that maximize the effects, and provide a robust platform for producing relatively large long-term metastable state densities.