Continuously replenished optical tweezer arrays will unlock unlimited-depth quantum circuits with neutral atom qubits. A key bottleneck limiting the cycle time of these systems is removing atoms from tweezers initially loaded with more than one atom. In the conventional technique of light-assisted collisions, slow collisional dynamics limit the timescale for removing excess atoms to several milliseconds. Here, we propose and demonstrate a scheme for selectively removing one atom at a time from multiply occupied tweezers on a microsecond timescale, using intra-tweezer Rydberg blockade and autoionization. We demonstrate the protocol in
171Yb in two complementary regimes. With two-photon Rydberg excitation from the ground state, we reduce multi-atom probability to 1% in 64.8
μs, while retaining single atoms in 58.2(2)% of the tweezers, which is comparable to the filling fraction achieved with light-assisted collisions under the same experimental conditions, but over two orders of magnitude faster. With single-photon excitation from the metastable state
3P0, reduced single-atom loss enables a higher filling fraction of 74.8(3)%, at the cost of additional temporal overhead to prepare the atoms in
3P0. The final filling fraction is limited by an unexplained two-body loss mechanism, which, if solved, could enable fast, quasi-deterministic loading.
We present an experimental system for Rydberg tweezer arrays with ytterbium (Yb) atoms featuring internal state manipulation between the ground
1S
0 and the metastable
3P
2 states, and single-photon excitation from the
3P
2 to Rydberg states. In the experiments, single Yb atoms are trapped in two-dimensional arrays of optical tweezers and are detected by fluorescence imaging with the intercombination
1S
0↔3P
1 transition, and the defect-free single atom arrays are prepared by the rearrangement with the feedaback. We successfully perform high-resolution
1S
0↔3P
2 state spectroscopy for the single atoms, demonstrating the utilities of this ultranarrow transition. We further perform single-photon excitation from the
3P
2 to Rydberg states for the single atoms, which is a key for the efficient Rydberg excitation. We also perform a systematic measurement of a complex energy structure of a series of D states including newly observed
3D
3 states. The developed system shows feasibility of future experiments towards quantum simulations and computations using single Yb atoms.