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IEEE Transactions on Applied Superconductivity

Progress in Development of the Superconducting Bolometer With Microwave Bias and Readout

S. V. Shitov, Artem A. Kuzmin, Michael Merker, Vladimir I. Chichkov, Alexey V. Merenkov, Andrey B. Ermakov, Alexey Vladimirovich Ustinov, M. Siegel

Published Jan 20, 2017• 10 citations
Publisher

Abstract

Our new detector and readout concept brings together TES (Transition Edge Sensor) and MKID (Microwave Kinetic Inductance Detector) technologies and exploits the idea of a microwave-induced superconducting transition in a small thin-film microbridge. The superconducting transition of the bridge manifests itself as variation in the Q -factor of niobium resonators at 5-8 GHz, somewhat similar to MKID operation. We present data showing the potential for developing this concept into multipixel detector arrays. Single-pixel sensitivity was measured at 4.5 K for an input band of 600-700 GHz using a prototype 10-nm-thick Nb bridge of size 1 μm × 500 nm. Radiation from human skin was detected with a resolution better than 1 K/rtHz, which is encouraging for terahertz imaging applications. To further improve device sensitivity, we are also developing Hf-based devices that operate near 0.35 K. Details about the physics and stability of these devices are discussed.

DOI
10.1109/tasc.2017.2655507

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Our new detector and readout concept brings together TES (Transition Edge Sensor) and MKID (Microwave Kinetic Inductance Detector) technologies and exploits the idea of a microwave-induced superconducting transition in a small thin-film microbridge. The superconducting transition of the bridge manifests itself as variation in the Q -factor of niobium resonators at 5-8 GHz, somewhat similar to MKID operation. We present data showing the potential for developing this concept into multipixel detector arrays. Single-pixel sensitivity was measured at 4.5 K for an input band of 600-700 GHz using a prototype 10-nm-thick Nb bridge of size 1 μm × 500 nm. Radiation from human skin was detected with a resolution better than 1 K/rtHz, which is encouraging for terahertz imaging applications. To further improve device sensitivity, we are also developing Hf-based devices that operate near 0.35 K. Details about the physics and stability of these devices are discussed.
To improve both scalability and noise-filtering capability of a transition-edge sensor (TES), a new concept of a thin-film detector is suggested, which is based on embedding a microbridge TES into a high-Q planar GHz-range resonator weakly coupled to a 50-Ω-readout transmission line. Such a TES element is designed as a hot-electron microbolometer coupled to a THz-range antenna and as a load of the resonator at the same time. A weak THz signal coupled to the antenna heats the microbridge TES, thus reducing the quality factor of the resonator and leading to a power increment in the readout line. The power-to-power conversion gain, an essential figure of merit, is estimated to be above 10. To demonstrate the basic concept, we fabricated and tested a few submicrometer-sized devices from Nb thin films for operation temperature about 5 K. The dc and RF characterization of the new device is made at a resonator frequency about 5.8 GHz. A low-noise high-electron mobility transistor amplifier is used in our TES experiments without the need for a SQUID readout. The optical sensitivity to blackbody radiation within the frequency band 600-700 GHz ismeasured as (2.7 ± 0.9) × 10-14W/√Hz at Tc≈ 5 K at bath temperature ≈1.5 K.
We present a superconducting noise bolometer for terahertz radiation, which is suitable for large-format arrays. It is based on an antenna-coupled superconducting micro-bridge embedded in a high-quality factor superconducting resonator for a microwave bias and readout with frequency-division multiplexing in the GHz range. The micro-bridge is kept below its critical temperature and biased with a microwave current of slightly lower amplitude than the critical current of the micro-bridge. The response of the detector is the rate of superconducting fluctuations, which depends exponentially on the concentration of quasiparticles in the micro-bridge. Excess quasiparticles are generated by an incident THz signal. Since the quasiparticle lifetime increases exponentially at lower operation temperature, the noise equivalent power rapidly decreases. This approach allows for large arrays of noise bolometers operating above 1 K with sensitivity, limited by 300-K background noise. Moreover, the response of the bolometer always dominates the noise of the readout due to relatively large amplitude of the bias current. We performed a feasibility study on a proof-of-concept device with a 1.0 × 0.5 μm2 micro-bridge from a 9-nm thin Nb film on a sapphire substrate. Having a critical temperature of 5.8 K, it operates at 4.2 K and is biased at the frequency 5.6 GHz. For the quasioptical input at 0.65 THz, we measured the noise equivalent power ≈3 × 10−12 W/Hz1/2, which is close to expectations for this particular device in the noise-response regime.
Superconducting microwave resonators have the potential to revolutionize submillimeter and far-infrared astronomy, and with it our understanding of the universe. The field of low-temperature detector technology has reached a point where extremely sensitive devices like transition-edge sensors are now capable of detecting radiation limited by the background noise of the universe. However, the size of these detector arrays are limited to only a few thousand pixels. This is because of the cost and complexity of fabricating large-scale arrays of these detectors that can reach up to 10 lithographic levels on chip, and the complicated SQUID-based multiplexing circuitry and wiring for readout of each detector. In order to make substantial progress, next- generation ground-based telescopes such as CCAT or future space telescopes require focal planes with large-scale detector arrays of 104–106 pixels. Arrays using microwave kinetic inductance detectors (MKID) are a potential solution. These arrays can be easily made with a single layer of superconducting metal film deposited on a silicon substrate and pattered using conventional optical lithography. Furthermore, MKIDs are inherently multiplexable in the frequency domain, allowing ∼ 103 detectors to be read out using a single coaxial transmission line and cryogenic amplifier, drastically reducing cost and complexity. An MKID uses the change in the microwave surface impedance of a superconducting thin-film microresonator to detect photons. Absorption of photons in the superconductor breaks Cooper pairs into quasiparticles, changing the complex surface impedance, which results in a perturbation of resonator frequency and quality factor. For excitation and readout, the resonator is weakly coupled to a transmission line. The complex amplitude of a microwave probe signal tuned on-resonance and transmitted on the feedline past the resonator is perturbed as photons are absorbed in the superconductor. The perturbation can be detected using a cryogenic amplifier and subsequent homodyne mixing at room temperature. In an array of MKIDs, all the resonators are coupled to a shared feedline and are tuned to slightly different frequencies. They can be read out simultaneously using a comb of frequencies generated and measured using digital techniques. This thesis documents an effort to demonstrate the basic operation of ∼ 256 pixel arrays of lumped-element MKIDs made from superconducting TiNx on silicon. The resonators are designed and simulated for optimum operation. Various properties of the resonators and arrays are measured and compared to theoretical expectations. A particularly exciting observation is the extremely high quality factors (∼ 3 × 107) of our TiNx resonators which is essential for ultra-high sensitivity. The arrays are tightly packed both in space and in frequency which is desirable for larger full-size arrays. However, this can cause a serious problem in terms of microwave crosstalk between neighboring pixels. We show that by properly designing the resonator geometry, crosstalk can be eliminated; this is supported by our measurement results. We also tackle the problem of excess frequency noise in MKIDs. Intrinsic noise in the form of an excess resonance frequency jitter exists in planar superconducting resonators that are made on dielectric substrates. We conclusively show that this noise is due to fluctuations of the resonator capacitance. In turn, the capacitance fluctuations are thought to be driven by two-level system (TLS) fluctuators in a thin layer on the surface of the device. With a modified resonator design we demonstrate with measurements that this noise can be substantially reduced. An optimized version of this resonator was designed for the multiwavelength submillimeter kinetic inductance camera (MUSIC) instrument for the Caltech Submillimeter Observatory.
We demonstrated and analyzed the smooth microwave-driven transition of a superconducting bridge made from Hf into its normal state at bath temperatures below the critical temperature of Hf (T c ≈ 380 mK). The bridge is integrated on a silicon chip with both the 600-700 GHz double-slot antenna and the 1.5-GHz CPW quarter-wave resonator (Q-factor ∼10 4 ) made from 100-nm Nb film. The experimental bridge was sized 2.5 um by 2.5 um by 50 nm and tested at temperatures down to 50 mK. Similar to the technique of MKID, we measured the dependence of transmission S 21 on microwave power at the bottom of the resonance curve. It was found that the microwave power absorbed in the bridge fits to the model of hot electron gas, P∼T e 6 -T ph 6 . The internal NEP down to ≈10 −18 W/⎷Hz is estimated due to thermal noise at the optimum electron gas temperature, T e ≈ 320 mK. The NEP can be scaled down below ≈10 −19 W/√Hz via reasonable reduction of the bridge volume. The new detector circuit is suitable for integration within a large imaging array exploiting the FDM-readout.
Abstract We studied and improved the performance of a terahertz (THz) direct detector based on the superconducting NbN hot electron bolometer (HEB) integrated with microwave readout for imaging arrays and other applications. A 6 nm thick NbN microbridge at the feed point of a twin-slot antenna is embedded into a high- Q quarter-wavelength coplanar waveguide (CPW) resonator made from a 350 nm thick NbN film which is weakly coupled to a CPW feedline. THz direct detection was performed at a signal frequency of 0.66 THz at a bath temperature of 4.2 K. When operating at a low input microwave power level, the device acting as a microwave kinetic inductance detector with a kinetic inductance fraction of 0.45 changes the surface impedance of the resonator in response to incident THz radiation. The estimated optical noise equivalent power ( NEP ) is ∼0.23 pW · Hz −0.5 which shows about one order of magnitude improvement compared to that of the traditional voltage-biased NbN HEBs. The improved performance of the THz direct detectors with lower NEP and easy readout makes them promising in imaging with a large number of the array pixels.
A high-quality superconducting resonator with a microbridge of hafnium film for use in a circuit for readout a terahertz-band imaging array with frequency division multiplexing is demonstrated experimentally. The variability of the impedance of the bridge at a frequency of 1.5 GHz, which is a key factor in the control of the quality of the resonator, is studied. The bridge, having a thickness of about 50 nm, a critical temperature T C ≈ 380 mK, and a plan size of 2.5 × 2.5 μm, was connected as a load of a resonator made of niobium film with a thickness of about 100 nm ( T C ~ 9 K). It is shown that the bridge smoothly changes its impedance proportionally to the bias power in the entire temperature range. The effective thermal insulation of the bridge was measured in a dilution cryostat at temperatures of 50–300 mK. Thermal conductivity G of the bridge was calculated and found to be ~4 × 10 –13 W/K, which gives an estimate of the sensitivity of the structure in the bolometric mode NEP ≈ 8 × 10 –19 W/Hz 1/2 at a temperature of 150 mK.