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Springer eBooks

Fabrication of Dc-SQUID with As-Grown YBaCuO Thin Film by Focused Ion Beam

Masami Tanioku, K. Kuroda, Kyoko Kojima, Koichi Hamanaka, Yoshinori Hisaoka, A. Shuhara, H. Murakami

Published Jan 1, 1990• 0 citations
Publisher
DOI
10.1007/978-4-431-68117-5_213

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Physics Procedia•Jan 1, 2012•10 citations
DC SQUIDs with outer loop size ∼10 μmx 10 μm have been fabricated with nanobridge Josephson junctions in thin Niobium films (25, 100 and 200 nm) using either electron beam or focused ion beam techniques. Such SQUIDs are ideally suited to incorporate into the centre strip of a superconducting coplanar waveguide. The current-voltage characteristics and magnetic field modulation of the SQUIDs are compared for the two methods. The temperature dependence of the critical current is quite linear for the e-beam devices whilst the focused ion beam devices fit an exponential. Here we also investigate trimming methods to reduce the critical currents of the nanojunctions fabricated in the thicker films, in order to improve the SQUID parameters at lower temperatures.