Bulletin of the American Physical Society
TiN superconducting coplanar waveguide resonators with single-photon quality factors of 1.5 million
Greg Calusine, Danna Rosenberg, David J. Hover, Rabindra Nath Das, Alexander J. Melville, Xhovalin Miloshi, Wayne H. Woods, Jonilyn Yoder, William D. Oliver