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ACTA PHOTONICA SINICA

Electromagnetically Induced Transparency-like Effect in the Optimized Silicon Micro Ring Resonators

王永华 WANG Yong-hua, 韦丽萍 WEI Li-ping, 臧俊斌 ZANG Jun-bin, 崔丹凤 CUI Dan-feng, 李艳娜 LI Yan-na, 刘耀英 LIU Yao-ying, 薛晨阳 Xue Chenyang

Published Jan 1, 2014• 0 citations
Publisher
DOI
10.3788/gzxb201443.0213004

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Electromagnetically Induced Transparency-like Effect in the Optimized Silicon Micro Ring Resonators

Wang Yong-hu

To realize the electromagnetically induced transparency-like effect on the silicon waveguide,a double ring resonators structure based on silicon-on-insulator was designed and fabricated.By post processing of thermal oxidation annealing under the temperature from 300℃to 1 200℃,wet chemical etching with buffered oxide etch and N2 annealing under the temperature of 1 000 ℃,the electromagnetically induced transparency-like curve via the vertical grating coupling method was observed.The effect of different distance between the two resonators to the electromagnetically induced transparency-like curve was analyzed.The Qfactor of a single ring in this fabrication was 5.1×104.The measured spectral width of the transparency window was as narrow as 500MHz.

ACTA PHOTONICA SINICA•Jan 1, 2014•0 citations
To realize the electromagnetically induced transparency-like effect on the silicon waveguide,a double ring resonators structure based on silicon-on-insulator was designed and fabricated.By post processing of thermal oxidation annealing under the temperature from 300℃to 1 200℃,wet chemical etching with buffered oxide etch and N2 annealing under the temperature of 1 000 ℃,the electromagnetically induced transparency-like curve via the vertical grating coupling method was observed.The effect of different distance between the two resonators to the electromagnetically induced transparency-like curve was analyzed.The Qfactor of a single ring in this fabrication was 5.1×104.The measured spectral width of the transparency window was as narrow as 500MHz.