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Bulletin of the American Physical Society

Integrated MEMS mass sensor and atom source for a ``Fab on a Chip''

Han Han, Matthias Imboden, Thomas Stark, D. J. Bishop

Published Mar 4, 2014• 0 citations
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MEMS vapor cells with buffer gas are the core components of chip scale atomic sensors due to the spin precession. We microfabricated rubidium vapor cells filled with neon based on MEMS technology and characterized the performance of MEMS vapor cells by measuring the longitudinal relaxation time. The dependence of spin relaxation time on buffer gas pressure and cell temperature was theoretically and experimentally investigated and the consistency was achieved. This provides a potential simpler approach to evaluate the performance of chip scale atomic sensors, such as atomic magnetometers, based on MEMS vapor cells.

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Quantum enhancement protocol report

Aleksandra Sierant

The goal of the QUANTIFY project is to develop advanced sensors based on functionalized MEMS atomic vapor cell technology (MEMS cells) and photonic integrated light sources, including the development of a quantum-enhanced optically pumped magnetometer using a photonic squeezer (PICSq). The purpose of this document is to describe the quantum-enhanced protocol to be later used with PICSq and MEMS cells. The work reported here was performed by and at ICFO, within the framework of the work package 3.

•Dec 31, 2025•0 citations
MEMS vapor cells with buffer gas are the core components of chip scale atomic sensors due to the spin precession. We microfabricated rubidium vapor cells filled with neon based on MEMS technology and characterized the performance of MEMS vapor cells by measuring the longitudinal relaxation time. The dependence of spin relaxation time on buffer gas pressure and cell temperature was theoretically and experimentally investigated and the consistency was achieved. This provides a potential simpler approach to evaluate the performance of chip scale atomic sensors, such as atomic magnetometers, based on MEMS vapor cells.
The goal of the QUANTIFY project is to develop advanced sensors based on functionalized MEMS atomic vapor cell technology (MEMS cells) and photonic integrated light sources, including the development of a quantum-enhanced optically pumped magnetometer using a photonic squeezer (PICSq). The purpose of this document is to describe the quantum-enhanced protocol to be later used with PICSq and MEMS cells. The work reported here was performed by and at ICFO, within the framework of the work package 3.