The development of integrated quantum photonics is integral to many areas of quantum information science, in particular linear optical quantum computing. In this context, a diversity of physical systems is being explored and thus versatility and adaptability are important prerequisites for any candidate platform. Silicon oxynitride is a promising material because its refractive index can be varied over a wide range. This dissertation describes the development of silicon oxynitride waveguides for applications in the field of integrated quantum photonics. The project consisted of three stages: design, characterisation, and application. First, the parameter space was studied through simulations. The structures were optimised to achieve low-loss devices with a small footprint at a wavelength of 900 nm. Buried channel waveguides with a cross-section of 1.6 μm x 1.6 μm and a core (cladding) refractive index of 1.545 (1.505) were chosen. Second, following their fabrication with plasma-enhanced chemical vapour deposition, electron beam lithography, and reactive ion etching, the waveguides were characterised. The refractive index was shown to be tunable from the silica to the silicon nitride regime. Optimised tapers significantly improved the coupling efficiency. The minimum bend radius was measured to be less than 2 mm. Propagation losses as low as 1.45 dB cm-1 were achieved. Directional couplers with coupling ratios ranging from 0 to 1 were realised. Third, building blocks for linear optical quantum computing were demonstrated. Reconfigurable quantum circuits consisting of Mach-Zehnder interferometers with near perfect visibilities were fabricated along with a four-port switch. The potential of quantum speedup was illustrated by carrying out the Deutsch-Jozsa algorithm with a fidelity of 100 % using on-demand single photons from a quantum dot. This dissertation presents the first implementation of tunable Mach-Zehnder interferometers, which act on single photons, based on silicon oxynitride waveguides. Furthermore, for the first time silicon oxynitride photonic quantum circuits were operated with on-demand single photons. Accordingly, this work has created a platform for the development of integrated quantum photonics.
The development of integrated quantum photonics is integral to many areas of quantum information science, in particular linear optical quantum computing. In this context, a diversity of physical systems is being explored and thus versatility and adaptability are important prerequisites for any candidate platform. Silicon oxynitride is a promising material because its refractive index can be varied over a wide range. This dissertation describes the development of silicon oxynitride waveguides for applications in the field of integrated quantum photonics. The project consisted of three stages: design, characterisation, and application. First, the parameter space was studied through simulations. The structures were optimised to achieve low-loss devices with a small footprint at a wavelength of 900 nm. Buried channel waveguides with a cross-section of 1.6 μm x 1.6 μm and a core (cladding) refractive index of 1.545 (1.505) were chosen. Second, following their fabrication with plasma-enhanced chemical vapour deposition, electron beam lithography, and reactive ion etching, the waveguides were characterised. The refractive index was shown to be tunable from the silica to the silicon nitride regime. Optimised tapers significantly improved the coupling efficiency. The minimum bend radius was measured to be less than 2 mm. Propagation losses as low as 1.45 dB cm-1 were achieved. Directional couplers with coupling ratios ranging from 0 to 1 were realised. Third, building blocks for linear optical quantum computing were demonstrated. Reconfigurable quantum circuits consisting of Mach-Zehnder interferometers with near perfect visibilities were fabricated along with a four-port switch. The potential of quantum speedup was illustrated by carrying out the Deutsch-Jozsa algorithm with a fidelity of 100 % using on-demand single photons from a quantum dot. This dissertation presents the first implementation of tunable Mach-Zehnder interferometers, which act on single photons, based on silicon oxynitride waveguides. Furthermore, for the first time silicon oxynitride photonic quantum circuits were operated with on-demand single photons. Accordingly, this work has created a platform for the development of integrated quantum photonics.
Silicon-on-insulator (SOI) wafers have been developed for electronic integrated circuits, but are also one of the most promising platforms in photonic integrated circuits due to its low loss, high refractive index, ability to fast phase modulation, and well-developed fabrication technologies. With advantages to handle light with a small volume and high modulation speed, silicon photonics has been intensively investigated as the next generation platform of signal processing, interconnection, and communication devices. Recently, silicon photonics has been attracted great interests in quantum optics communities as optical quantum systems for linear optical quantum computing are achievable using silicon photonic components including beam splitters, phase modulators, and filters and the small footprint of a silicon photonic quantum system has unprecedented performances of high stability and scalability. Here we show our recent results on the fabrication of silicon photonic elements for quantum applications. We fabricated low-loss optical waveguides, efficient fiber-to-waveguide grating couplers, resonator-based optical filters, and tunable beam splitters and tested their performances. A micro-sized heater is attached on a Mach-Zehnder interferometer, showing stable operation as a slow phase modulator. In addition, phase modulators using plasma dispersion effects are under investigation. Finally, the quantum characteristics of photon pairs generated by spontaneous four-wave mixing in silicon waveguides are investigated. These results will be an essential cornerstone for the realization of quantum optical computing and quantum communication devices.
Programmable waveguide circuits are crucial building blocks for integrated spectrometric applications and quantum photonic information processing. Amongst the dielectric material platforms in integrated photonics, silicon nitride stands out with highly attractive properties such as a large bandgap energy and a moderately high index contrast. This allows low propagation losses in a wide spectral range while simultaneously allowing a dense packing of components. The aforementioned properties, together with the inherent phase stability and phase programmability achievable in silicon nitride, enable the creation of complex photonic circuits. In this thesis we describe and demonstrate densely integrated programmable photonic circuits based on silicon nitride waveguides for wavelength metrology and quantum information processing. We concentrate on reconfigurable photonic integrated circuits based on silicon nitride waveguides with low-loss propagation, to explore interference in the spectral and temporal domain for advanced applications. We investigated two types of integrated interferometric devices featuring low loss in combination with programmability for classical and quantum photonic processing. The first is simple tunable microring resonator circuits in combination with neural network data processing for the analysis of classical light in the spectral domain as wavelength meter. The second is a complex tunable network of waveguide interferometers for controlling quantum correlations (coincidences) between single photons. Exploiting the long-term interferometric stability, low propagation loss and tight optical confinement of integrated silicon nitride waveguides, we have shown complex reconfigurable optical circuits both for classical and quantum photonic processing. For future development of integrated programmable photonic processors, various challenges need to be addressed such as compact and low-power phase shifters, a further increase of the component density and lower the propagation losses.
For over a decade the field of quantum photonics has increasingly looked towards optical integrated platforms to perform more complex and sophisticated experiments. Silica integrated optics is an ideal material for this area, offering low propagation and fibre-coupling losses. To date many of the key on-chip experiments have been carried out in this platform, using bespoke monolithic devices. In this work we propose an alternative approach, implementing a linear network constructed from a number of identical reconfigurable modules. The modules are measured separately to produce an accurate model of the overall network. The cellular nature also allows the replacement of modules that are faulty or substandard. Each module comprises of an array of 10 Mach-Zhender interferometers. Forty thermo-optic phase shifters on each chip allows the control of both the amplitude and phase of the optical field within the devices. By cascading the modules any arbitrary NxN unitary network can be realised. The optical waveguides within the modules are fabricated by direct UV writing, where a scanning focused UV laser beam increases the local refractive index within a photosensitive germanosilicate glass layer. The resulting channel waveguides are engineered to have dimensions that are mode matched to standard optical fibre producing excellent coupling efficiency. Bragg gratings can also be simultaneously produced within the waveguides which greatly assists in the precise characterisation of the phase shifters, coupling ratios and optical losses within the modules. We will present our recent work in this area, demonstrating devices operating at telecom wavelengths for quantum information processing. We present a modular reconfigurable system for on-chip quantum optics experiments with excellent fibre compatibility and low propagation losses, implemented using direct-UV-written silica-on-silicon. The performance of fabricated devices in various configurations is reported.
The emerging field of quantum technologies requires a range of photonic devices, many with demanding specifications. The area of quantum information processing requires scaling in order to increase the complexity of experiments, this has led researchers towards integrated photonic platforms. The key property of these single photon devices is low-loss operation and as a consequence glass and silica devices have been a dominant platform. Whereas atom chip sensors require stable compact systems for converting optical fibre modes to free space beams for atom trapping. In this talk I will present the photonic engineering undertaken at the University of Southampton to fabricate devices for the quantum technology community. The key fabrication approach is a direct UV writing technique, where a UV laser beam is used to define waveguides, splitters/couplers, Bragg gratings and 2D tilted gratings. The fabricated devices include cascaded arrays of Mach-Zehnder interferometers to preform photon-photon interactions, single photon sources via spontaneous four-wave mixing, integrated superconducting single photon detectors and 2D diffraction gratings. In addition to the inscription method I will describe the fabrication of the substrates required for the UV writing process which are generated via Flame Hydrolysis Deposition. I will discuss our most recent work on single photon linear optical networks constructed from a number of identical reconfigurable modules. The modules are characterised separately to produce an accurate model of the network and the cellular approach permits the replacement of modules that are deficient. Each module comprises of an array of 10 Mach-Zehnder interferometers with 40 thermo-optic phase shifters on each chip that control both the amplitude and phase of the optical modes. By concatenating modules any arbitrary N ×N unitary network can be realised. The channel waveguides are engineered to be mode matched to standard optical fibre producing excellent coupling efficiency. I will present our recent work in this area and other photonic devices for the field of quantum technology.
In the past decades quantum optics has been at the forefront of quantum innovative technologies. For practical applications, scalable platforms for implementation of quantum optical circuits are vital. This thesis presents two new platforms for scalable implementation of quantum optical circuits, namely, modular approach and monolithic integration. Here, we take the first steps towards the integration of three main elements of every quantum optics circuits: Single-photon emitters, single-photon detectors, and quantum logics. Until now, most quantum optical circuits used separate platforms for single-photon generation and detection. The main challenge in the integration of these technologies, which have different requirements, has slowed down the research in the field. Here, we integrate sources and detectors by first fabricating the devices on their own platform and then transferring and combining them together. Plasma enhanced chemical vapor deposition of silicon nitride followed by etching optical waveguides connect these elements. Removing the Poissonian optical excitation field from the quantum circuit is necessary for integration. Classical optical excitation can be avoided if the sources are electrically pumped. However, fabrication of high-quality electrically pumped sources, suitable for integration, has been limited. The experiments described in chapter 4 are our first step towards addressing the mentioned problem. Defect-free nanowires are grown on <100> direction and their optoelectronic performance are characterized. Nanowire quantum dots, thanks to their waveguiding, purity, coherence and their potentials for deterministic integration with other optical circuits, are promising single-photon sources for on-chip quantum optics. However, precise control of the emission energy of the quantum dots by growth has not become possible yet. Chapter 5 describes a method for on-chip tuning of emission energy of nanowire quantum dots using strain fields. We show the emission energy of independent nanowire quantum dots can be brought into degeneracy without affecting their single-photon emission properties. The quantum optical components have to be routed and connected together to form functional circuits. On a chip, this is usually carried out using optical waveguides. Moreover, manipulation of single photons has to be done in a scalable fashion. Again optical waveguides and ring resonators are very good candidates for this task. Therefore, understanding the behavior of these circuits such as their losses, polarization dependence, and temperature behavior is important. The experiment described in chapter 6 studies the behavior of plasma enhanced silicon nitride waveguides in cryogenic temperatures. We concluded in this chapter that due to weak thermo-optic sensitivity of silicon nitride at cryogenic temperatures, the available thermal budget on the system should be carefully considered. An important step in achieving a scalable platform for quantum optical circuits is deterministic and efficient integration of single-photon sources. In chapter 7, we demonstrate successful integration of III-V nanowire quantum dots with silicon nitride waveguides. The nanowires are deterministically selected and transferred from the original growth chip to the new substrate where they are integrated with low-loss silicon nitride waveguides. Our measurements show that the integrated sources preserve their high quality emission properties. In chapter 8, we describe an alternative approach: amodular method for scalable quantum optics. The proposed technique is based on coupling the single-photon from sources into optical fibers where the photons can be processed and then fed into the single-photon detectors. This approach has high flexibility and is easier to implement but as described in the chapter, at the moment, losses in the interfaces between optical fibers and single-photon sources are a major limiting factor. We conclude the thesis with some possible future directions and exciting new results on integration of single-photon detectors with sources and waveguides. Finally, primary results on on-chip single-photon filtering and removal of the optical excitation field are demonstrated.
The creation of a quantum photonic integrated circuit, bringing together quantum light sources; detectors; and elements for routing and modulating the photons; is a fundamental step towards a compact and self-contained quantum information processor. Here we report on the realisation of a new hybrid integration platform for InAs Quantum Dot-based quantum light sources and waveguide-based photonic circuits. In this scheme, GaAs devices containing embedded quantum dots are bonded to a silicon oxynitride waveguide circuit such that the quantum dot emission is coupled to the waveguide mode. The output from the waveguide element is coupled into optical fibre (also bonded to the waveguide chip) and the whole assembly is cooled to cryogenic temperatures. Integrated tuneable Mach-Zehnder interferometers permit on-chip photon routing to be achieved and allow the device to act as a path-encoded qubit preparation device. By utilising one such interferometer as a reconfigurable beam splitter, the single photon nature of the emission was confirmed by a Hanbury Brown and Twiss measurement on chip.