Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

IEEE Transactions on Applied Superconductivity

Titanium Based Transition Edge Microcalorimeters for Optical Photon Measurements

Daiji Fukuda, R. M. T. Damayanthi, Akio Yoshizawa, Nobuyuki Zen, Hisanari Takahashi, K. Amemiya, M. Ohkubo

Published Jun 1, 2007• 29 citations
Publisher

Abstract

Transition edge sensor microcalorimeters can be used in many optical quantum measurements because of its low dark counts, high quantum efficiency, and high resolving power of a photon number in weak light pulses. In order to increase count rates up to a few MHz, we have developed a titanium transition edge sensor for the optical measurements, and its performances were analysed. Titanium is one of the ideal superconductor because of its higher transition temperature and lower optical reflectance at 1.5 wavelength. Our titanium film was fabricated with electron-beam evaporation, and showed high residual resistance ratio of 3.5. The sharp superconducting transition also was found at 359 mK, which is close to the critical temperature in bulk. The fabricated device showed a fast response to pulsed laser illumination of 1.5 wavelength with the fall time constant of 300 ns. These features are very promising for high-speed single photon detection in many quantum optical measurements.

DOI
10.1109/tasc.2007.897393

Related papers

Titanium TES based photon number resolving detectors with 1 MHz counting rate and 65% quantum efficiency

Daiji Fukuda, Go Fujii, Takayuki Numata +4 more

A transition edge sensor (TES) is one of superconducting photon detectors, which has a photon number resolving ability in light pulses. The TES device is a kind of calorimeters operated at an extremely low temperature, and the energy of the photons is measured as a resistance change in a superconducting transition region of the TES. The advantages of the TESs are an excellent energy resolution and a high quantum efficiency. However a response speed is limited due to slow thermal recovery time. To overcome this, we fabricated new TES devices which are based on a titanium superconductor. The critical temperature of our titanium films is around 410 mK, which greatly improves the thermal recovery time. The observed decay time constant of response signals to the light pulses is around several hundreds of ns, that make it possible to operate the devices at a counting rate over 1 MHz. The photon number resolving power is 0.35 eV(FWHM) for a 5 μm size device even at the high operating temperature. The system quantum efficiency is 65 % by embedding the TES films in an optical structure with a high reflection dielectric mirror and an anti-reflection coatings fabricated by an ion beam assisted sputtering method. These features are very promising for high speed photon number resolving applications in the quantum information field.

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE•Dec 2, 2008•11 citations

Development of Titanium-Based Transition-Edge Single-Photon Detector

Wen Zhang, Yue Geng, Zheng Wang +7 more

Superconducting transition-edge sensors (TESs), working as single-photon detectors with high quantum efficiency, low dark count rate, and photon number resolving capability, have been successfully used in quantum information experiments as well as astronomical transient object observations. Aiming to achieve high count rate, we are developing titanium-based superconducting TES single-photon detectors with a critical temperature of ~300 mK. Ti-based TESs with active area from 10 × 10 μm to 40 × 40 μm are first fabricated on silicon substrate coated with SiOx. The fabricated TES devices show a thermal conductance scaling with the active area and an effective time constant of ~4 μs from pulsed laser diode illumination. In order to get high quantum efficiency, we further design and fabricate a 1550-nm optical cavity based on dielectric mirror and antireflection layer, and study its absorption with an IR spectrometer. Ti TES devices on the dielectric mirror are then fabricated and the superconducting transition is measured.

IEEE Transactions on Applied Superconductivity•Mar 19, 2019•19 citations

Fast Response and High Quantum Efficiency Ti-Based TES Optical Detector and its Application to Quantum Information

Daiji Fukuda, Betty Young, Blas Cabrera +1 more

High performance optical photon detectors are indispensable for quantum communications. Superconducting detectors are very attractive because of their high quantum efficiency and intrinsic low dark count probability. We have been developing high performance optical photon detectors with a Titanium‐based transition edge sensor (Ti‐TES), which have superconducting critical temperatures around 300 mK. The relatively high transition temperature enables rapid thermal relaxation of the absorbed photon energy, resulting in excellent temporal characteristics such as fast response time below 1 μs, low timing jitter of 33 ns, and maximum counting rate over 1 MHz. Although there is a tradeoff relationship between the temporal response and energy resolution, we have simultaneously achieved high quantum efficiency and high energy resolution. We fabricated Ti‐TES devices with an optical cavity structure for photon absorption enhancement in the superconducting film. The measured quantum efficiency is over 95 % at 850 nm wavelength, and the energy resolution is 0.28 and 0.6 eV FWHM for the 5 μm and 10 μm square size devices, respectively, which is sufficient to resolve the photon number of the 850 nm light pulses. These high performance detectors are expected to be one of the powerful components in quantum information, communication and measurement technologies. We will also report and discuss the application of the Ti‐TES photon detectors to quantum communication systems.

AIP conference proceedings•Jan 1, 2009•0 citations

Development of High Detection Efficiency Titanium Transition-Edge Sensors for 1550 nm Single-Photon Detection

Xiaolong Xu, Peizhan Li, Carlo Pepe +10 more

Transition-edge sensors (TESs) have shown the capability of both energy resolution and resolving photon numbers. In this work, we present the fabrication and characterization of high detection efficiency Ti optical TESs with the critical temperatureTc= 213 mK and the photon-number resolving capability at telecommunication wavelength 1550 nm. The Ti superconducting film is prepared by a DC magnetron sputtering technique. An optical cavity comprised of 5-layers antireflection and 15-layers high-reflection Ta2O5/SiO2is enclosed with the Ti film by an ion beam assisted deposition method to improve detection efficiency, which brings the absorption of 99.74%. The energy resolution for the Ti TES with sensitive area 20 μm × 20 μm is 0.45 eV and the detection efficiency is 97% ± 1%.

IEEE Transactions on Applied Superconductivity•Jan 12, 2026•2 citations

Single-photon light detection with transition-edge sensors

M. Rajteri, E. Taralli, Chiara Portesi +1 more

Transition-Edge Sensors (TESs) are microcalorimeters that measure the energy of incident single photons by the resistance increase of a superconducting film biased within the superconducting-to-normal transition. TES are able to detect single photons from IR to X-ray with an intrinsic energy resolution and photon-number discrimination capability. Metrology, astronomy and quantum \ncommunication are the fields where these properties can be particularly useful. In this work, we report about characterization of different TESs based on Ti films. Single photons have been detected from 200nm to 800 nm working at transition temperature Tc ∼ 100 mK. Using a pulsed laser at 690nm we have demonstrated the capability to resolve up to five photons.

NCimC•Jul 1, 2008•2 citations

Fabrication and Characterization of Fast TESs With Small Area for Single Photon Counting

Chiara Portesi, E. Taralli, L. Lolli +2 more

Transition edge sensors (TESs) with high energy resolution (ΔE) at telecommunication wavelengths have been realized in the last years for application to experiments of quantum optics and quantum information. In these fields, lasers with repetition rate of the order of 50 MHz are usually applied and hence TES with recovery times lower than 20 ns would be desirable. To this aim, Ti TESs with area ranging between 1 μm × 1 μm and 2 μm × 2 μm are fabricated and characterized, to study the effects of the different sizes of active areas and critical temperatures on the energy resolutions and on the response times. Titanium TESs have been fabricated by thermal evaporation and Electron Beam Lithography technique on Si/SiN substrates, and they have been electrically and optically characterized. The experimental data have been analyzed and correlated to the detector geometrical parameters. The superconducting transitions of TESs with areas down to 1 μm × 1 μm result to be affected by lateral proximity effects of Nb wirings. Ti TESs with critical temperature of 470 mK show response time of about 150 ns and energy resolution of 0.16 eV.

IEEE Transactions on Applied Superconductivity•Nov 20, 2014•20 citations
Transition edge sensor microcalorimeters can be used in many optical quantum measurements because of its low dark counts, high quantum efficiency, and high resolving power of a photon number in weak light pulses. In order to increase count rates up to a few MHz, we have developed a titanium transition edge sensor for the optical measurements, and its performances were analysed. Titanium is one of the ideal superconductor because of its higher transition temperature and lower optical reflectance at 1.5 wavelength. Our titanium film was fabricated with electron-beam evaporation, and showed high residual resistance ratio of 3.5. The sharp superconducting transition also was found at 359 mK, which is close to the critical temperature in bulk. The fabricated device showed a fast response to pulsed laser illumination of 1.5 wavelength with the fall time constant of 300 ns. These features are very promising for high-speed single photon detection in many quantum optical measurements.
A transition edge sensor (TES) is one of superconducting photon detectors, which has a photon number resolving ability in light pulses. The TES device is a kind of calorimeters operated at an extremely low temperature, and the energy of the photons is measured as a resistance change in a superconducting transition region of the TES. The advantages of the TESs are an excellent energy resolution and a high quantum efficiency. However a response speed is limited due to slow thermal recovery time. To overcome this, we fabricated new TES devices which are based on a titanium superconductor. The critical temperature of our titanium films is around 410 mK, which greatly improves the thermal recovery time. The observed decay time constant of response signals to the light pulses is around several hundreds of ns, that make it possible to operate the devices at a counting rate over 1 MHz. The photon number resolving power is 0.35 eV(FWHM) for a 5 μm size device even at the high operating temperature. The system quantum efficiency is 65 % by embedding the TES films in an optical structure with a high reflection dielectric mirror and an anti-reflection coatings fabricated by an ion beam assisted sputtering method. These features are very promising for high speed photon number resolving applications in the quantum information field.
Superconducting transition-edge sensors (TESs), working as single-photon detectors with high quantum efficiency, low dark count rate, and photon number resolving capability, have been successfully used in quantum information experiments as well as astronomical transient object observations. Aiming to achieve high count rate, we are developing titanium-based superconducting TES single-photon detectors with a critical temperature of ~300 mK. Ti-based TESs with active area from 10 × 10 μm to 40 × 40 μm are first fabricated on silicon substrate coated with SiOx. The fabricated TES devices show a thermal conductance scaling with the active area and an effective time constant of ~4 μs from pulsed laser diode illumination. In order to get high quantum efficiency, we further design and fabricate a 1550-nm optical cavity based on dielectric mirror and antireflection layer, and study its absorption with an IR spectrometer. Ti TES devices on the dielectric mirror are then fabricated and the superconducting transition is measured.
High performance optical photon detectors are indispensable for quantum communications. Superconducting detectors are very attractive because of their high quantum efficiency and intrinsic low dark count probability. We have been developing high performance optical photon detectors with a Titanium‐based transition edge sensor (Ti‐TES), which have superconducting critical temperatures around 300 mK. The relatively high transition temperature enables rapid thermal relaxation of the absorbed photon energy, resulting in excellent temporal characteristics such as fast response time below 1 μs, low timing jitter of 33 ns, and maximum counting rate over 1 MHz. Although there is a tradeoff relationship between the temporal response and energy resolution, we have simultaneously achieved high quantum efficiency and high energy resolution. We fabricated Ti‐TES devices with an optical cavity structure for photon absorption enhancement in the superconducting film. The measured quantum efficiency is over 95 % at 850 nm wavelength, and the energy resolution is 0.28 and 0.6 eV FWHM for the 5 μm and 10 μm square size devices, respectively, which is sufficient to resolve the photon number of the 850 nm light pulses. These high performance detectors are expected to be one of the powerful components in quantum information, communication and measurement technologies. We will also report and discuss the application of the Ti‐TES photon detectors to quantum communication systems.
Transition-edge sensors (TESs) have shown the capability of both energy resolution and resolving photon numbers. In this work, we present the fabrication and characterization of high detection efficiency Ti optical TESs with the critical temperatureTc= 213 mK and the photon-number resolving capability at telecommunication wavelength 1550 nm. The Ti superconducting film is prepared by a DC magnetron sputtering technique. An optical cavity comprised of 5-layers antireflection and 15-layers high-reflection Ta2O5/SiO2is enclosed with the Ti film by an ion beam assisted deposition method to improve detection efficiency, which brings the absorption of 99.74%. The energy resolution for the Ti TES with sensitive area 20 μm × 20 μm is 0.45 eV and the detection efficiency is 97% ± 1%.
Transition-Edge Sensors (TESs) are microcalorimeters that measure the energy of incident single photons by the resistance increase of a superconducting film biased within the superconducting-to-normal transition. TES are able to detect single photons from IR to X-ray with an intrinsic energy resolution and photon-number discrimination capability. Metrology, astronomy and quantum \ncommunication are the fields where these properties can be particularly useful. In this work, we report about characterization of different TESs based on Ti films. Single photons have been detected from 200nm to 800 nm working at transition temperature Tc ∼ 100 mK. Using a pulsed laser at 690nm we have demonstrated the capability to resolve up to five photons.
Transition edge sensors (TESs) with high energy resolution (ΔE) at telecommunication wavelengths have been realized in the last years for application to experiments of quantum optics and quantum information. In these fields, lasers with repetition rate of the order of 50 MHz are usually applied and hence TES with recovery times lower than 20 ns would be desirable. To this aim, Ti TESs with area ranging between 1 μm × 1 μm and 2 μm × 2 μm are fabricated and characterized, to study the effects of the different sizes of active areas and critical temperatures on the energy resolutions and on the response times. Titanium TESs have been fabricated by thermal evaporation and Electron Beam Lithography technique on Si/SiN substrates, and they have been electrically and optically characterized. The experimental data have been analyzed and correlated to the detector geometrical parameters. The superconducting transitions of TESs with areas down to 1 μm × 1 μm result to be affected by lateral proximity effects of Nb wirings. Ti TESs with critical temperature of 470 mK show response time of about 150 ns and energy resolution of 0.16 eV.