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IEEE Transactions on Magnetics

A.C. properties of NbN based Josephson junctions

Gianfranco Paternò, Anna Maria Cucolo, L. Maritato, A. Nigro, Aniello Saggese, R. Vaglio

Published Mar 1, 1987• 6 citations
Publisher

Abstract

High quality NbN-NbOX-Pb Josephson devices have been fabricated by r.f. diode sputtering. The critical temperatures of the NbN films were as high as 16.8 K. The junction geometry was defined by photolithography and the oxide barrier was obtained by thermal oxidation or by a plasma oxidation technique. Very low leakage currents have been obtained, corresponding to values of the parameter Vm = 80 mV (Vm = IO× 2 mV/I (2mV)). The junction microwave quality factor Q and other a.c. properties have been measured in the frequency range 20 - 300 GHz by looking at the devices self-resonant modes. Q values up to 120 at 4.2 K have been found in the low frequency range, indicating potential performances of these devices for microwave applications such as Josephson voltage standards. Theoretical analysis of the results shows that the main contribution to the losses is related to the NbN films surface impedance.

DOI
10.1109/tmag.1987.1065120

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High quality NbN-NbOX-Pb Josephson devices have been fabricated by r.f. diode sputtering. The critical temperatures of the NbN films were as high as 16.8 K. The junction geometry was defined by photolithography and the oxide barrier was obtained by thermal oxidation or by a plasma oxidation technique. Very low leakage currents have been obtained, corresponding to values of the parameter Vm = 80 mV (Vm = IO× 2 mV/I (2mV)). The junction microwave quality factor Q and other a.c. properties have been measured in the frequency range 20 - 300 GHz by looking at the devices self-resonant modes. Q values up to 120 at 4.2 K have been found in the low frequency range, indicating potential performances of these devices for microwave applications such as Josephson voltage standards. Theoretical analysis of the results shows that the main contribution to the losses is related to the NbN films surface impedance.
We report the electrical properties of all niobium nitride(NbN) Josephson tunnel junctions with magnesium oxide(MgO) films as barriers in the temperature range 4.2-15 K. NbN/MgO/NbN Josephson tunnel junctions have large gap voltages(Vg=4.8-5.4 mV), large products of the maximum critical currents and the normal tunneling resistances(IcRn=3.15-3.35 mV), and small subgap leakage currents(Vm=13-138 mV) at 4.2 K. The junction parameters decreased with increase in temperature, but reasonably large junction parameters(for example, Vg=4.9 mV, IcRn=2.67 mV, and Vm=22 mV) have been obtained even at 9 K. The magnetic penetration depth in NbN electrodes has been measured up to 15 K using two-junction interferometers which consist of NbN/MgO/NbN junctions, NbN ground planes, and NbN control lines.
Abstract In this work, we report the electrical properties of NbN internally shunted Josephson junctions with NbN x barriers. Cross-sectional scanning transmission electron microscopy analysis shows that all layers have the same cubic structure; NbN/NbN x /NbN trilayers were epitaxially grown on MgO substrates. The resistivity of the NbN x films could be varied in the range of 1–104 mΩ cm by controlling both the N2 partial pressure and the deposition time during reactive sputtering. The temperature dependence of the critical current density (J c) and characteristic voltage (I c R n) of the junctions with different barrier resistivities were measured for various barrier thicknesses. For the 10 nm-thick NbN x layer with resistivities of 73.44, 385.72, and 711 mΩ cm, the coherence length of the barrier was determined to be 5.55 ± 0.07, 4.88 ± 0.06, and 1.40 ± 0.13 nm, respectively, corresponding to carrier diffusion rates of 2.741 ± 0.004, 1.211 ± 0.002, and 0.008 ± 0.001 cm2 s−1, respectively. Thus, the reduction in barrier resistivity leads to a larger coherence length and a faster diffusion rate, which will further increase the J c and I c R n of the junction. By adjusting the barrier resistivity and thickness, the J c of the junction can be easily tuned over more than four orders of magnitude, and an I c R n value of 0.97 ± 0.07 mV was obtained at 10 K. The results indicate that the all-NbN self-shunt junction is a promising candidate in high-speed and high-temperature applications.
All NbN Josephson junctions with polycrystalline NbN films for both electrodes and barriers have been fabricated and their microwave characteristics for a quantum voltage standard were investigated. A superconductor and a normal metal were prepared by changing the partial pressure of N2during the rf sputter deposition of NbN films. For the Josephson junctions normal resistance was controlled by changing the partial pressure of N2during the NbNxbarrier deposition, and critical current was controlled by changing barrier thickness. As a result, it was found that the product of current and normal resistance can be optimized to maximize the current range of the constant-voltage step for quantum voltage standards.
We have developed a new integration method for Josephson tunnel junctions based on high Tc superconducting compound materials such as NbN. In this method, a sputtered ZnO film has been employed as a resist mask which can be used in high substrate temperatures during the film deposition. It has been found that fine patterns of the refractory superconducting film can be obtained by this method and the patterning processes have no interference with other integration processes. We have applied this method to patterning base electrode of NbN and formed high quality NbN-oxide-Pb Josephson tunnel junctions by using an rf plasma oxidation. The fabricated junctions have been found to have a relatively large gap ( ∼ 4.0 mV ) and low current leak in the subgap region, and to be quite stable for thermal cyclings and storage. We have also fabricated quantum interference memory devices by integrating these junctions and the operation has been successfully demonstrated.
We have fabricated both NbN/Ta x N/NbN SN*S-type, NbN/MgO/NbN SIS-type Josephson junctions and microwave band-pass filters on different substrates (Si, Sapphire, MgO). NbN films have been deposited on both sides of (100) oriented, 250 µm thick, MgO substrates with a high crystalline texture quality. The aim was to investigate the performances and the maximum achievable operating frequency in an NbN based RSFQ modulator front-end of an ADC in the 4 K-10 K temperature range. We observed that Ta x N thin films can be tuned from an insulating phase to a superconducting phase (Tc ∼4K) by varying the nitrogen content during sputter deposition while the barrier height of MgO can also be controlled by deposition conditions and by tri-layer postdeposition annealing. Junction properties (Jc∼10-25 kA/cm 2 ), Mac Cumber parameter and RnIc product measured up to 1 mV are shown to be controlled by the reactive sputtering conditions. We have designed three pole band-pass filters and resonators in a micro-strip configuration and studied the junction coupling with the filters. We will show that a sigma-delta NbN technology is a suitable solution for analogue-to-digital conversion in the future generations of telecommunication satellites to achieve high sampling frequency and large bandwidth at high carrier frequency signal.