Replacing the bulky cryoliquid-based cooling stages of cryoenabled instruments by chip-scale refrigeration is envisioned to disruptively reduce the system size similar to microprocessors did for computers. Electronic refrigerators based on superconducting tunnel junctions have been anticipated to provide a solution, but reaching the necessary above the 1-K operation temperature range has remained a goal out of reach for several decades. We show efficient electronic refrigeration by
Al-
AlOx-
Nb superconducting tunnel junctions starting from bath temperatures above 2 K. The junctions can deliver electronic cooling power up to approximately
mW/mm2, which enables us to demonstrate tunnel-current-driven electron temperature reduction from 2.4 K to below 1.6 K (34% relative cooling) against the phonon bath. Our work shows that the key material of integrated superconducting circuits---niobium---enables powerful cryogenic refrigerator technology. This result is a prerequisite for practical cryogenic chip-scale refrigerators and, at the same time, it introduces a new electrothermal tool for quantum heat-transport experiments.
We have developed a set of SQUIDs optimized for readout of ac-biased transition edge sensors. Junction shunts are made of Pd and attached to cooling fins to facilitate low-noise operation at sub-kelvin temperatures. SQUID's have a low loop inductance in order to reach a large natural dynamic range even without negative feedback. The SQUIDs are intended to be used for frequency-domain multiplexing of X-ray calorimeter arrays. Both traditional dc-SQUIDs and novel un-SQUIDs are manufactured. The fabrication process and SQUID design criteria are reviewed.