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Nanotechnologies in Russia

Nanolithography with atom optics

V. I. Balykin, Павел Николаевич Мелентьев

Published Aug 1, 2009• 19 citations
Publisher

Abstract

We review the main results obtained in fast-growing new type of particle optics—atom optics and one of its practical applications—atom nanolithography. Basic methods for creating elements of atom optics are considered. Main achievements of atom nanolithography are presented with discussion for atom nanolithography perspectives.
DOI
10.1134/s1995078009070040

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