Bulletin of the American Physical Society
Neutral Atom Lithography Using a Bright Metastable Helium Beam
Claire V. Shean, Jason Reeves, Michael Keller, Matthias Riedmann, Harold J. Metcalf
Published May 19, 2006• 0 citations
Bulletin of the American Physical Society
Claire V. Shean, Jason Reeves, Michael Keller, Matthias Riedmann, Harold J. Metcalf