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International Conference on Electronic Packaging Technology (ICEPT)

System integration of a SERF atomic magnetometer on a glass wafer substrate

Yu Ji, Jintang Shang, Qi Gan, Lei Wu

Published Aug 1, 2015• 1 citation
Publisher

Abstract

High sensitive SERF(spin-exchange-relaxation-free) atomic magnetometers play an important role in many fields including geophysical mapping, space science, nuclear magnetic resonance, health care and perimeter and remote monitoring. This paper presents a novel approach for the system integration of a SERF atomic magnetometer. First of all, Rb vapor cell integrated with micro heater and Helmholtz coils was selected as physic part of the system and the vapor cell was characterized by pressure broadening effect to analyze nitrogen buffer gas pressure in the vapor cell. Then optical module including laser, micro-lens to collimate light beam emitting from the laser, quarter-wave plate to circularly polarize laser beam was taken as optical pumping and probing source simultaneously, and the interaction of circularly polarized laser beam with rubidium atoms was detected by silicon PIN photo-detectors. At last, Laser module, physics part of the system and silicon PIN photo-detector were integrated on a glass wafer substrate benefiting from the characteristics of non-magnetic material and good flatness, based on the integrated SERF atomic magnetometer, weak magnetic field could be measured. Results demonstrate that the SERF atomic magnetometer is integrated successfully and could be used for the detection of weak magnetic field.

DOI
10.1109/icept.2015.7236733

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High sensitive SERF(spin-exchange-relaxation-free) atomic magnetometers play an important role in many fields including geophysical mapping, space science, nuclear magnetic resonance, health care and perimeter and remote monitoring. This paper presents a novel approach for the system integration of a SERF atomic magnetometer. First of all, Rb vapor cell integrated with micro heater and Helmholtz coils was selected as physic part of the system and the vapor cell was characterized by pressure broadening effect to analyze nitrogen buffer gas pressure in the vapor cell. Then optical module including laser, micro-lens to collimate light beam emitting from the laser, quarter-wave plate to circularly polarize laser beam was taken as optical pumping and probing source simultaneously, and the interaction of circularly polarized laser beam with rubidium atoms was detected by silicon PIN photo-detectors. At last, Laser module, physics part of the system and silicon PIN photo-detector were integrated on a glass wafer substrate benefiting from the characteristics of non-magnetic material and good flatness, based on the integrated SERF atomic magnetometer, weak magnetic field could be measured. Results demonstrate that the SERF atomic magnetometer is integrated successfully and could be used for the detection of weak magnetic field.
Wafer-level integration of micro heater on an alkali vapor cell for chip-scale SERF magnetometers is presented. In order to obtain a suitable resistivity, polysilicon and aluminum are mixed as the target material. Magnetron sputtering is adopted to fabricate the heater on the surface of the alkali vapor cell. Various voltages are applied to the heater, of which the temperatures are measured by thermal sensitive sensors. Spin exchange relaxation free (SERF) atomic magnetometer with the heater integrated on the alkali vapor cell is characterized. Results show that the micro heater is successfully integrated on the alkali vapor cell. With the integrated heater, the rubidium vapor cell is heated up to 120°C by a 445kHz AC current. The sensitivity of the SERF magnetometer is 6.3pT/Hz1/2. Results also indicate that it provides an effective and low-cost solution for the miniaturization of atomic magnetometers.
High sensitive atomic magnetometers play an important role in many fields including geophysical mapping, space science, nuclear magnetic resonance, health care and perimeter and remote monitoring. In this study, a novel method to fabricate the micro spherical Rubidium vapor cell has been investigated and the integration of micro spherical rubidium vapor cell in 3-axis atomic magnetometer has been demonstrated successfully. First of all, a fabrication process for micro spherical alkali vapor cells is introduced. Then the prepared uniform wafer-level micro spherical rubidium vapor cell has been characterized by Ultraviolet spectrophotometer as well as a laser frequency locking system. At last, 3-axis atomic magnetometer based on the micro spherical rubidium vapor cell has been demonstrated. Results show that micro spherical rubidium vapor cell has been fabricated successfully. Results also indicate that a 3-axis atomic magnetometer based on the micro spherical rubidium vapor cell could measure magnetic fields along three directions (BX, BYand BZ).
This paper introduces measurement of weak magnetic field using a novel design of chip-scale Spin Exchange Relaxation Free (SERF) atomic magnetometer based on a microfabricated Rubidium (Rb) vapor cell. The sensor, which integrates a micro-fabricated Rb vapor cell, a heater and related components, is fabricated by stacking printed circuit boards (PCB) and Micro Electro Mechanical Systems (MEMS) process technology. During the experiments, the noise of the measurement using the atomic magnetometer was obtained. In addition, a test of the simulated magnetic field was performed in a shielding cylinder, and the signal of the simulated magnetic field about 100 pT at 1.2 Hz was measured. The signal is processed by the software using a notch filter to suppress the Direct Current (DC) noise and 50Hz noise. This paper provides a novel micro-fabricated device for detecting weak magnetic field.
This paper presents a novel scheme on the integration of chip-scale SERF magnetometer using a vertical-cavity surface-emitting laser(VCSEL) as pumping and detecting laser. The fabrication and integration process of the whole system based on stacking PCB boards consist of VCSEL, optical components, rubidium vapor cell, photo-detector, three axis Helmholtz coils. By calculation and measurement, it was found that the module is designed with a minimum output power of 0.15mW and a competitive volume of 1.4×1.4×2.5cm3. Experiments show that the sensitivity of chip-scale SERF magnetometer based on VCSEL is around 1.87pT/Hz1/2in magnetic shield environment, the integration and miniaturization design process of the magnetometer can be empolyed for magnetoencephalography(MEG) measurement.
Nowadays, quantum sensor research is a very interesting and popular topic. High-sensitivity magnetic field measurements using quantum sensors have evolved into the most sensitive magnetic field sensor category today with the invention of atomic magnetometers operating in the spin-exchange relaxation-free (SERF) regime. This letter was prepared to investigate the magnetic field sensitivity changes depending on the buffer gas, temperature, and laser intensity using indigenously produced atomic vapor cells. In addition, the aim was to determine the optimum operating conditions of the atomic magnetometer operating in the SERF regime. As a result, the resonance linewidth and signal-to-noise ratio were measured, and the minimum detectable magnetic field was calculated. According to the obtained results, the lowest magnetic field for Cells I–III was measured as 5.12, 4.21, and 4.81 pT, respectively. The lowest magnetic field of all conditions was obtained in vapor cell (Cell-II) at 100 °C with 5 mW laser intensity. As a result, it has been experimentally proven that under the same conditions, increasing the buffer gas pressure in vapor cells can narrow the resonance linewidth, and the magnetic field sensitivity can be improved by increasing the laser intensity applied to the vapor cells.
Highly sensitive optical magnetometers present high performance in detection of biological magnetic fields from the heart or the brain and have impact on other areas as diverse as magnetic resonance imaging, space science and remote monitoring. A chip-scale SERF-regime optical magnetometer based on a MEMS process is fabricated instead of a large-chamber one and the optical module and the vapor cell are fabricated based on the MEMS process. Industrialization, low cost and high systematic integration level of magnetic sensors can also be achieved based on the wafer-level packaging. Besides, a 200KHz AC electronic current was applied to the heaters for reducing magnetic noises generated by DC currents from heating resistors. The experimental setup based on a SERF-regime magnetometer to test magnetic fields is shown and results indicate that magnetic fields are tested successfully.