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arXiv:2607.14319

Towards a monolithic platform for coupling superconducting circuits to low-loss microwave phonons in AlScN on 4H-SiC

Yuanchen Deng, William W. Roberts, Sueli Skinner-Ramos, Dalton Anderson, Katherine Hewey, Xingyu Du, Michael Miller, Brandon Smith, Hwijong Lee, Pingping Chen, Charles Thomas Harris, Roy H. Olsson, Lisa Hackett, Rupert Lewis, Matt Eichenfield

quant-phphysics.app-phSubmitted Jul 15, 2026• Announced Jul 17, 2026• 0 citations
arXivHTMLPDF

Abstract

Hybrid superconducting-phonon quantum processing is promising for cavity QED, measurement-based quantum computing, and other quantum applications. Relative to microwave photons at the same frequency, phonons can provide ultra-compact footprints, extremely low losses, and greater connectivity. Phonons can also couple strongly to superconducting circuits through the piezoelectric effect. However, this promise rests on scalable platforms that achieve these benefits without degrading superconducting circuit performance. This motivates a monolithic platform combining low phononic loss, strong electromechanical coupling, and superconducting-circuit compatibility without requiring suspended phononics. Here, we characterize a monolithic quantum acoustic platform combining aluminum superconducting circuits on exposed silicon carbide (SiC) with piezoelectric aluminum scandium nitride (AlScN) on SiC for integrated phononics. This architecture is enabled by selective removal of AlScN from selected chip regions, allowing aluminum superconducting microwave resonators to be fabricated directly on the SiC while preserving adjacent AlScN-on-SiC regions for phonon transduction. The resulting Al-on-SiC resonators exhibit a coherent lifetime of 2.9 μs, demonstrating compatibility with aluminum superconducting quantum devices. In parallel, cryogenic surface acoustic delay-line measurements on the retained AlScN-on-SiC regions show low phononic propagation loss at 4.05 GHz, corresponding to an estimated phonon lifetime of 7.6 μs. Together with a previously demonstrated electromechanical coupling coefficient of about 4.3% and a theoretical upper bound of 8%, these results establish Al-on-SiC/AlScN-on-SiC as a promising monolithic platform for integrating superconducting microwave circuits with piezoelectric phononic components for quantum acoustic networking and hybrid quantum systems.

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•Jan 1, 2025•0 citations
Hybrid superconducting-phonon quantum processing is promising for cavity QED, measurement-based quantum computing, and other quantum applications. Relative to microwave photons at the same frequency, phonons can provide ultra-compact footprints, extremely low losses, and greater connectivity. Phonons can also couple strongly to superconducting circuits through the piezoelectric effect. However, this promise rests on scalable platforms that achieve these benefits without degrading superconducting circuit performance. This motivates a monolithic platform combining low phononic loss, strong electromechanical coupling, and superconducting-circuit compatibility without requiring suspended phononics. Here, we characterize a monolithic quantum acoustic platform combining aluminum superconducting circuits on exposed silicon carbide (SiC) with piezoelectric aluminum scandium nitride (AlScN) on SiC for integrated phononics. This architecture is enabled by selective removal of AlScN from selected chip regions, allowing aluminum superconducting microwave resonators to be fabricated directly on the SiC while preserving adjacent AlScN-on-SiC regions for phonon transduction. The resulting Al-on-SiC resonators exhibit a coherent lifetime of 2.9 μs, demonstrating compatibility with aluminum superconducting quantum devices. In parallel, cryogenic surface acoustic delay-line measurements on the retained AlScN-on-SiC regions show low phononic propagation loss at 4.05 GHz, corresponding to an estimated phonon lifetime of 7.6 μs. Together with a previously demonstrated electromechanical coupling coefficient of about 4.3% and a theoretical upper bound of 8%, these results establish Al-on-SiC/AlScN-on-SiC as a promising monolithic platform for integrating superconducting microwave circuits with piezoelectric phononic components for quantum acoustic networking and hybrid quantum systems.
Quantum excitations of macroscopic surface acoustic waves (SAWs) have been tailored to control, communicate, and transduce stationary and flying quantum states. However, the limited lifetime of these hybrid quantum systems remains critical obstacles to extend their applications in quantum information processing. Here, we present potentials of thin film aluminum nitride to on-chip integrated phonons with superconducting qubits over previous bulk piezoelectric substrates. We have reported high-quality thin film GHz-SAW resonators with the highest internal quality factor Qi of 4.92×104 in the quantum regime. The internal losses of SAW resonators are systematically investigated by tuning the parameters of sample layout, power, and temperature. Our results manifest that SAWs on piezoelectric films are readily integrated with standard fabrication of Josephson junction quantum circuits and offer excellent acoustic platforms for high-coherence quantum acoustodynamics architectures.
The evolution of superconducting quantum processors is driven by the need to reduce errors and scale for fault-tolerant computation. Reducing physical qubit error rates requires further advances in the microscopic modeling and control of decoherence mechanisms in superconducting qubits. Piezoelectric interactions contribute to decoherence by mediating energy exchange between microwave photons and acoustic phonons. Centrosymmetric materials like silicon and sapphire do not display piezoelectricity and are the preferred substrates for superconducting qubits. However, the broken centrosymmetry at material interfaces may lead to piezoelectric losses in qubits. While this loss mechanism was predicted two decades ago, interface piezoelectricity has not been experimentally observed in superconducting devices. Here, we report the observation of interface piezoelectricity at an aluminum-silicon junction and show that it constitutes an important loss channel for superconducting devices. We fabricate aluminum interdigital surface acoustic wave transducers on silicon and demonstrate piezoelectric transduction from room temperature to millikelvin temperatures. We find an effective electromechanical coupling factor of K2≈2×10−5%K^2\approx 2 \times 10^{-5}\%K2≈2×10−5% comparable to weakly piezoelectric substrates. We model the impact of the measured interface piezoelectric response on superconducting qubits and find that the piezoelectric surface loss channel limits qubit quality factors to Q∼104−108Q\sim10^4-10^8Q∼104−108 for designs with different surface participation ratios and electromechanical mode matching. These results identify electromechanical surface losses as a significant dissipation channel for superconducting qubits, and show the need for heterostructure and phononic engineering to minimize errors in next-generation superconducting qubits.
Abstract The development of superconducting quantum processors relies on understanding and mitigating decoherence in superconducting qubits. Piezoelectric coupling contributes to decoherence by mediating energy exchange between microwave photons and acoustic phonons. Although bulk centrosymmetric materials like silicon and sapphire are non-piezoelectric and commonly used as qubit substrates, the lack of centrosymmetry at interfaces may induce piezoelectric losses. This effect was predicted decades ago but never experimentally observed in superconducting devices. Here, we report interface piezoelectricity at aluminum-silicon junctions and demonstrate it as a significant loss channel in superconducting devices. Using aluminum interdigital transducers on silicon, we observe piezoelectric transduction from room to millikelvin temperatures, with an effective electromechanical coupling factor K 2 ≈ (3 ± 0.4) × 10 −5 %, comparable to weakly piezoelectric substrates. Modeling shows this mechanism limits qubit quality factors to Q ~ 10 4 − 10 8 , depending on surface participation and mode matching. These findings reveal interface piezoelectricity as a major dissipation channel and highlight the need for heterostructure and phononic engineering in next-generation superconducting qubits.
Phonon modes at microwave frequencies can be cooled to their quantum ground state using conventional cryogenic refrigeration, providing a convenient way to study and manipulate quantum states at the single phonon level. Phonons are of particular interest because mechanical deformations can mediate interactions with a wide range of different quantum systems, including solid-state defects, superconducting qubits, and optical photons when using optomechanically active constructs. Phonons, thus, hold promise for quantum-focused applications as diverse as sensing, information processing, and communication. Here, we describe a piezoelectric quantum bulk acoustic resonator (QBAR) with a 4.88 GHz resonant frequency, which, at cryogenic temperatures, displays large electromechanical coupling strength combined with a high intrinsic mechanical quality factor, Qi≈4.3×104. Using a recently developed flip-chip technique, we couple this QBAR resonator to a superconducting qubit on a separate die and demonstrate the quantum control of the mechanics in the coupled system. This approach promises a facile and flexible experimental approach to quantum acoustics and hybrid quantum systems.
We introduce a hybrid tripartite quantum system for strong coupling between a semiconductor spin, a mechanical phonon, and a microwave excitation of a superconducting circuit. Consisting of a piezoelectric resonator with an integrated diamond strain concentrator, this system achieves microwave-acoustic and spin-acoustic coupling rates of approximately megahertz or greater, allowing simultaneous ultrahigh cooperativities (approximately 103{10}^{3}103 and approximately 102{10}^{2}102, respectively). From finite-element modeling and master-equation simulations, we estimate superconducting-circuit-to-spin quantum state transfer fidelities exceeding 0.95 on the basis of separately demonstrated device parameters. We anticipate that this device will enable hybrid quantum architectures that leverage the advantages of both superconducting circuits and solid-state spins for information processing, memory, and networking.
Quantum networks of superconducting circuit quantum processors are an exciting prospect but are unfeasible without an efficient quantum interface between optical light and superconducting qubits. This problem motivates the development of a quantum microwave-to-optical transducer, a device that can faithfully transfer the state of a superconducting circuit to a photonic flying qubit and vice versa. This thesis describes our progress towards building a microwave-to-optical transducer mediated by phonons in a high-overtone bulk acoustic resonator (HBAR). Novel aluminum nitride-on-quartz HBARs are designed, fabricated, and tested. The acoustic loss rates are found to be near the state-of-the-art. Transduction-compatible transmon qubits are designed and tested. These qubits are capable of operating inside an optical cavity as well as achieving electromechanical interactions in the strong-coupling regime. An initial experiment studied how superconducting qubits recover after exposure to infrared light and demonstrated that the transduction-compatible qubits should be able to operate in a transducer with a reasonable duty cycle. The concept of microwave-to-optical transduction using multiple acoustic modes is established, and new simulation methods are developed to rapidly optimize HBARs. These tools are used to create a transduction-compatible qubit-HBAR device operating in the multi-mode strong coupling regime. Separately, a transduction compatible optical cavity was built and used to perform optomechanical measurements of a transduction-compatible HBAR and confirm that this device can reach the high-cooperativity regime. Finally, a measurement for verifying that a transducer is operating as a source of single photons is discussed. This can be accomplished by measuring the optical second-order correlation function of transduced photons. A filter cavity cascade is constructed to perform this measurement without being overwhelmed by optical pump leakage. These results establish bulk acoustic transduction as a promising platform for low-noise quantum microwave-to-optical transduction.