The merits of thin-film surface acoustic wave (SAW) devices are pivotal to develop the high-performance intermodal acousto-optic modulators. In this work, we have proposed shear-horizontal (SH) SAW resonators for anticipated intermodal acousto-optic modulation on the thin-film lithium niobate platform. Through optimization of the cut angle of LN films, the SAW wavelength, and the thickness of interdigital transducer (IDT) electrodes, the calculated acousto-optic overlap factors utilizing SH0 modes are improved by more than an order of magnitude compared with those of Rayleigh modes. Furthermore, we have fabricated and characterized three kinds of proof-of-principle SH0 mode devices without/with grating reflectors. The electromechanical coupling coefficients (keff^2) and quality factors (Q) in the overtone resonators with grating reflectors are systematically evaluated, featuring the highest Q of 843 with the compromised keff^2 of 0.96%-4.72%. The results reveal that the temperature coefficients of frequency (TCF) of Rayleigh modes vary across various overtones, whereas the SH0 modes exhibit TCFs in the range of 32.3-68.9 ppm/C. Our fabricated SH0-mode overtone resonators demonstrate the capability of operating at power levels up to 29 dBm without electrode damage, offering a promising paradigm for robust and high-efficiency intermodal acousto-optic modulators with potential applications in integrated optical signal processing, microwave photonics,and quantum information technologies.
The merits of thin-film surface acoustic wave (SAW) devices are pivotal to develop the high-performance intermodal acousto-optic modulators. In this work, we have proposed shear-horizontal (SH) SAW resonators for anticipated intermodal acousto-optic modulation on the thin-film lithium niobate platform. Through optimization of the cut angle of LN films, the SAW wavelength, and the thickness of interdigital transducer (IDT) electrodes, the calculated acousto-optic overlap factors utilizing SH0 modes are improved by more than an order of magnitude compared with those of Rayleigh modes. Furthermore, we have fabricated and characterized three kinds of proof-of-principle SH0 mode devices without/with grating reflectors. The electromechanical coupling coefficients (keff^2) and quality factors (Q) in the overtone resonators with grating reflectors are systematically evaluated, featuring the highest Q of 843 with the compromised keff^2 of 0.96%-4.72%. The results reveal that the temperature coefficients of frequency (TCF) of Rayleigh modes vary across various overtones, whereas the SH0 modes exhibit TCFs in the range of 32.3-68.9 ppm/C. Our fabricated SH0-mode overtone resonators demonstrate the capability of operating at power levels up to 29 dBm without electrode damage, offering a promising paradigm for robust and high-efficiency intermodal acousto-optic modulators with potential applications in integrated optical signal processing, microwave photonics,and quantum information technologies.
Surface-acoustic-wave (SAW) resonators are a promising platform for constructing hybrid quantum systems, where confined acoustic waves enable strong interaction with various physical systems. Focusing SAW resonators, reducing mode volume while suppressing diffraction losses, have recently been investigated for application in such hybrid systems. However, the resonator leads to additional transverse-mode resonances, which cause undesired responses. In this work, we develop focusing SAW resonators on a thin-film lithium niobate on sapphire. A film thinner than the SAW wavelength allows a highly confined acoustic-wave mode to be localized on the substrate surface. By using contoured electrodes following a two-dimensional Gaussian beam shape, we make the SAW mode focused to nearly a diffraction-limited and confirm it via optical imaging. Furthermore, by engineering the spatial mode overlap of the interdigital transducer electrodes, we suppress the excitation of higher-order transverse modes.
Efficient and stable microwave-optical transduction is a key enabling technology for distributed superconducting quantum computing and heterogeneous quantum networks. Electro-optic transducers based on thin-film lithium niobate (TFLN) have shown strong promise, but demonstrations to date have been limited by various factors such as low frequency bias drift, low efficiency, fabrication complexity, and scalability. Here we demonstrate the first integrated electro-optic microwave-optical transducers realized in thin-film lithium tantalate (TFLT), a material platform offering Pockels nonlinearity comparable to TFLN together with improved bias stability and high-power handling. We fabricate superconducting microwave resonators coupled to tunable photonic-molecule optical resonators using wafer-scale deep ultraviolet lithography, offering high-throughput production of hundreds of devices per wafer. Across six devices we observe coherent bidirectional conversion between C-band optical photons and 4.9-5.5 GHz microwave photons, with measured on-chip efficiencies and inferred single-photon coupling rates g_0/2π ~ 1 kHz consistent with theory. Continuous operation over multiple days is achieved using a static bias field with minimal feedback, demonstrating a major operational advantage. We further characterize optical loss statistics, microwave resonator performance, and optically induced added noise under pulsed pumping, finding less than one added photon for 100 microsecond pulses at the highest measured efficiencies. These results establish TFLT as a scalable and robust electro-optic platform for future quantum interconnects and modular quantum processors.
Quantum excitations of macroscopic surface acoustic waves (SAWs) have been tailored to control, communicate, and transduce stationary and flying quantum states. However, the limited lifetime of these hybrid quantum systems remains critical obstacles to extend their applications in quantum information processing. Here, we present potentials of thin film aluminum nitride to on-chip integrated phonons with superconducting qubits over previous bulk piezoelectric substrates. We have reported high-quality thin film GHz-SAW resonators with the highest internal quality factor Qi of 4.92×104 in the quantum regime. The internal losses of SAW resonators are systematically investigated by tuning the parameters of sample layout, power, and temperature. Our results manifest that SAWs on piezoelectric films are readily integrated with standard fabrication of Josephson junction quantum circuits and offer excellent acoustic platforms for high-coherence quantum acoustodynamics architectures.
Lithium niobate is a promising material for developing quantum acoustic technologies due to its strong piezoelectric effect and availability in the form of crystalline thin films of high quality. However, at radio frequencies and cryogenic temperatures, these resonators are limited by the presence of decoherence and dephasing due to two-level systems. To mitigate these losses and increase device performance, a more detailed picture of the microscopic nature of these loss channels is needed. In this study, we fabricate several lithium niobate acoustic wave resonators and apply different processing steps that modify their surfaces. These treatments include argon ion sputtering, annealing, and acid cleans. We characterize the effects of these treatments using three surface-sensitive measurements: cryogenic microwave spectroscopy measuring density and coupling of TLS to mechanics, X-ray photoelectron spectroscopy and atomic force microscopy. We learn from these studies that, surprisingly, increases of TLS density may accompany apparent improvements in the surface quality as probed by the latter two approaches. Our work outlines the importance that surfaces and fabrication techniques play in altering acoustic resonator coherence, and suggests gaps in our understanding as well as approaches to address them.
Quantum networks of superconducting qubits linked by optical channels could leverage both the quantum information processing capabilities of superconducting circuits and the long communication distances provided by optical photons. Such networks would require high efficiency, low noise, and wide bandwidth transducers between microwave and optical frequencies. Transducers based on the Pockels electro-optic (EO) effect are particularly promising in this application for their direct conversion mechanism and potential for strong performance. EO transducers could also be used for sensitive optical modulators and low-noise detection of microwave and millimeter-wave signals. This dissertation presents recent work to create cavity EO transducers in thin-film lithium niobate, an integrated photonics platform that provides low optical loss and strong EO coupling. I first describe the theory of cavity electro-optics and how it can be used to generate high-efficiency transduction between microwave and optical fields. An initial device is presented and characterized, demonstrating per-photon on-chip transduction efficiencies of up to (2.7 ± 0.3) × 10^−5. A key benefit of the device described here, which is based on photonic molecule modes, is the ability to use a static electro-optic bias to trim the transducer into resonance. However, we find the migration of free carriers in thin-film lithium niobate reduces the EO response of the device to static fields, making such trimming ineffective. This carrier migration is a key challenge for enabling the promise of low-power electro-optics provided by thin-film lithium niobate devices. I characterize the low-frequency electro-optic response, which suggests that conduction occurs on the etched surface of lithium niobate. I show how this conduction can be reduced – and low-frequency EO performance improved – by changing the electrode design and annealing the devices. Following this, I describe the design and initial characterization of an improved transducer device. Finally, I describe a scheme by which even relatively low-efficiency transducers could be used to generate remote entanglement using an optically heralding scheme. Demonstration of such a system appears possible with current devices, suggesting that small opticallymediated quantum networks of superconducting qubits may be feasible soon.
Thin-film lithium niobate (LN) has become an enabling platform in the development of quantum integrated circuits, for applications including microwave-to-optical converters and electromechanical transducers. Incorporation of high-quality planar superconducting resonators will further elevate the performance of these devices. However, alongside the desired interactions originated from LN, its piezoelectric nature also introduces parasitic coupling between microwave and phononic modes, resulting in excessive dielectric loss. In this work, we investigate such coupling by studying niobium nitride resonators directly deposited on patterned LN thin films. By varying device configuration, we pinpoint that overlapping electric field with LN can inadvertently excite bulk acoustic modes within the substrate, inducing microwave loss independent of the acoustic dissipation rate. The experimental results are supported by simulation and theoretical modeling. Our approach can be applied to different piezoelectric systems and provide insights into the design of microwave components for quantum transduction devices.