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arXiv:2606.04914

Tunable Resonator Integrated Magnetometry

Colin Stack, Brian Sears, Aruna Ramanayaka, David Ferguson, Ilya Sochnikov, Tony X. Zhou

cond-mat.mes-hallcond-mat.mtrl-scicond-mat.supr-conphysics.app-phquant-phSubmitted Jun 3, 2026• Announced Jun 4, 2026• 0 citations
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Abstract

The quantum-technology revolution is reshaping computing, sensing, and communication. In magnetometry, recent advances leverage precise control of spin qubits and color centers in solid-state crystals for mesoscopic-scale sensing. Yet at very low temperatures, superconducting sensing technology remains unrivaled because of its non-invasiveness and higher sensitivity. Here we describe a class of superconducting sensors that offers low loss and quantum non-demolition measurement characteristics. We designed and fabricated a superconducting flux-tunable resonator (tRes) in a superconducting chip foundry and matured it to a level that combines the speed of an inductor-capacitor circuit with the flux sensitivity of a superconducting quantum interference device (SQUID) to perform magnetometry at milli-kelvin temperature to investigate targets. We introduce its fundamental functionality readily at MHz magnetic sampling rate, showcase two measurement modalities, and investigate three circuits with gradually increasing complexity to extract target-specific information. The combination of high sensitivity and fast readout characteristics make tRes an attractive and versatile magnetometer.

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The quantum-technology revolution is reshaping computing, sensing, and communication. In magnetometry, recent advances leverage precise control of spin qubits and color centers in solid-state crystals for mesoscopic-scale sensing. Yet at very low temperatures, superconducting sensing technology remains unrivaled because of its non-invasiveness and higher sensitivity. Here we describe a class of superconducting sensors that offers low loss and quantum non-demolition measurement characteristics. We designed and fabricated a superconducting flux-tunable resonator (tRes) in a superconducting chip foundry and matured it to a level that combines the speed of an inductor-capacitor circuit with the flux sensitivity of a superconducting quantum interference device (SQUID) to perform magnetometry at milli-kelvin temperature to investigate targets. We introduce its fundamental functionality readily at MHz magnetic sampling rate, showcase two measurement modalities, and investigate three circuits with gradually increasing complexity to extract target-specific information. The combination of high sensitivity and fast readout characteristics make tRes an attractive and versatile magnetometer.
There is currently fundamental and technological interest in measuring and manipulating nanoscale magnets, particularly in the quantum coherent regime. To observe the dynamics of such systems one requires a magnetometer with not only exceptional sensitivity but also high gain, wide bandwidth, and low backaction. We demonstrate a dispersive magnetometer consisting of a two-junction superconducting quantum interference device (SQUID) in parallel with an integrated, lumped-element capacitor. Input flux signals are encoded as a phase modulation of the microwave drive tone applied to the magnetometer, resulting in a single quadrature voltage signal. For strong drive power, the nonlinearity of the resonator results in quantum limited, phase sensitive parametric amplification of this signal, which improves flux sensitivity at the expense of bandwidth. Depending on the drive parameters, the device performance ranges from an effective flux noise of 0.29 $\ensuremath{\mu}{\ensuremath{\Phi}}_{0}$Hz${}^{\ensuremath{-}1/2}$ and 20 MHz of signal bandwidth to a noise of 0.14 $\ensuremath{\mu}{\ensuremath{\Phi}}_{0}$Hz${}^{\ensuremath{-}1/2}$ and a bandwidth of 0.6 MHz. These results are in excellent agreement with our theoretical model.
We have designed and characterized a micro-SQUID with dispersive readout for use in low temperature scanning probe microscopy systems. The design features a capacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12 GHz, micrometer spatial resolution, and integrated superconducting coils for local application of magnetic fields. The SQUID is operated as a nonlinear oscillator with a flux- and power-dependent resonance frequency. Measurements for device characterization and noise benchmarking were carried out at 4 K. The measured flux noise above 10 kHz at 4 K is 80 nΦ0 Hz−1∕2 at a bandwidth of 200 MHz. Estimations suggest that one can benefit from parametric gain based on inherent nonlinearity of the Josephson junction and reduce the flux noise to 30 nΦ0Hz–1∕2 at 100 mK, which corresponds to 10.6 μBHz–1∕2 for a magnetic moment located at the center of the pickup loop.Measuring the magnetic response of mesoscopic samples or mapping it vs. position for extended systems is effective methods for revealing the fundamental quantum properties of condensed matter systems. Over the past few decades, many advanced magnetic imaging schemes have been developed, including magnetic force microscopy,1 scanning Hall probe microscopy,2 superconducting interference devices (SQUIDs),3,4 and NV center based magnetometry.5 The high sensitivity, low back action, and low power dissipation of SQUIDs make them attractive for many types of low temperature experiments. One classic example is the central role of scanning SQUID microscopy in tests of pairing symmetry of high-Tc cuprate superconductors.6 Other prominent applications are the thermodynamic characteristics of persistent currents in normal metal rings7 and proof of edge states in topological insulators in the quantum spin Hall regime.8A key performance for a SQUID is its flux sensitivity. Parametric amplification has been harnessed in nano-SQUIDs based on aluminum junctions9,10 in order to reduce the flux noise down to 30 nΦ0Hz–1∕2 with a bandwidth exceeding 60 MHz.10 Recent studies on parametric amplifiers and dispersive readout of superconducting qubits also harness the nonlinearity of the Josephson junction to boost sensitivity.11–13In scanning SQUID microscopy, signal sources often behave dipole-like, such as superconducting vortices in mesoscopic dots or currents in mesoscopic rings. Smaller SQUIDs provide better coupling to smaller samples which leads to higher spin sensitivity3,14 as the magnetic field of a dipole decreases with 1/r3. Various approaches have been pursued to reduce the size. The smallest nano-SQUID to date has been fabricated by evaporating Nb or Pb15 onto the apex of a sharp quartz tip reaching a loop diameter of below nm and a spin sensitivity of 0.38 μBHz−1/2 at tens of kHz bandwidth. Compared to such size-optimized devices, micro-SQUIDs fabricated using a standard Nb technique have the advantage of on-chip field coils and modulation coils,14 and can be operated at 4 K allowing for a wide range of applications. However, these come at the cost of larger pick-up loops of a few microns and a resulting poorer spin sensitivity of 200 μBHz−1/2 for a magnetic moment located at the center of the pickup loop.The limitation of large pickup loops was previously only overcome by devices with pickup loops defined by the focused-ion-beam,16 but has recently also been achieved by improvements in lithography and shown to offer better spatial resolution as well.17 Here, we present a scanning micro-SQUID which is based on the same fabrication technology incorporating another major advancement. Our design exploits the parametric amplification based on nonlinearities of the SQUID to boost sensitivity. The combination of a smaller pickup loop and parametric amplification of the signal leads to better spin sensitivity (10.6 μBHz−1/2) and higher bandwidth (200 MHz) compared to traditional DC micro-SQUIDs in which the flux sensitivity is mainly limited by internal dissipation.Our devices were fabricated at Hypres Inc. using planarized Nb/AlOx/Nb trilayer Josephson junction technology, including two planarized Nb layers with approximately 0.8 μm minimum feature size. The SQUID consists of a superconducting ring shunted by one Josephson junction with a designed critical current of 20 μA [Fig. 1(a)]. With this geometry, the SQUID is gradiometric, i.e., the effect of any homogeneous background magnetic field approximately cancels out. The smallest pickup loops implemented have an inner (outer) diameter of 1 μm (2 μm). The superconducting loop is shunted by an on-chip parallel-plate capacitor with amorphous silicon dioxide as dielectric which was designed to have a capacitance of 80 pF. The superconducting loop and the capacitor form a resonator with a flux dependent resonance frequency from 5 to 12 GHz. The pickup loops are placed on opposite corners of the parallel-plate capacitor at a distance of about 450 μm so that one loop can be located in close proximity to the sample while the other is kept far away from it. External fields can be applied to the sample by local single-turn field coils situated around each pickup loop. The field coils are fully integrated into the chip layout and can also be used to bias the SQUID at its most sensitive point. Compared to using additional modulation coils,14 this approach has the advantage of reducing the total device inductance, which leads to a higher sensitivity.18 In a scanning microscope, the field coil at the rear end (away from the sample) can be used to bias the SQUID or operate it in flux feedback such that resulting stray fields will not act on the sample, apart from a weak screening current through the pickup loop. The effective diameter of each coil is 7.5 μm, resulting in a mutual inductance of about 0.34 Φ0/mA (for the smallest pickup loop). The SQUID resonator is connected by an on-chip Z0 = 50 Ω coplanar waveguide (CPW) transmission line to the bonding pads. The two field coils are connected by two smaller CPWs to the bottom edge bonding pads [Fig. 1(c)], ending in two parallel-stripline waveguides running alongside the edges of the capacitor towards the respective field coils. Based on estimations, it should thus be possible to apply high frequency signals of at least several GHz to SQUID and sample.
We describe a dispersive nanoSQUID (nanoscale superconducting quantum interference device) magnetometer comprised of two variable thickness aluminum weak-link Josephson junctions shunted in parallel with an on-chip capacitor. This arrangement forms a nonlinear oscillator with a tunable 4–8 GHz resonant frequency with a quality factor Q = 30 when coupled directly to a 50 Ω transmission line. In the presence of a near-resonant microwave carrier signal, a low frequency flux input generates sidebands that are readily detected using microwave reflectometry. If the carrier excitation is sufficiently strong, then the magnetometer also exhibits parametric gain, resulting in a minimum effective flux noise of 30 n Φ 0 Hz −1/2 with 20 MHz of instantaneous bandwidth. If the magnetometer is followed with a near-quantum-noise-limited Josephson parametric amplifier, we can increase the bandwidth to 60 MHz without compromising sensitivity. This combination of high sensitivity and wide bandwidth with no on-chip dissipation makes this device ideal for local sensing of spin dynamics, both classical and quantum.
Superconducting circuits are promising components for future quantum information technologies such as quantum computing, quantum simulation, and quantum sensing. Superconducting quantum interference devices (SQUIDs) and superconducting flux qubits can be used as a sensitive magnetic field sensor to detect local electron spin resonance (ESR). These types of sensor are characterized by good sensitivity and high spatial resolution for electron spins. In fact, we have achieved a sensitivity of 20 spins/Hz\sqrt{\text {Hz}}Hz​ with a sensing volume of 6 fl combining a flux qubit and qubit readout using a Josephson bifurcation amplifier. As a demonstration, we measured the ESR spectrum of erbium electron spins in a Y2_{2}2​SiO5_{5}5​ crystal and nitrogen vacancy centers in diamond. In both cases, we obtained reasonable electron spin parameters by fitting a simulation to the spectrum. In this way, we proved superconducting circuits to be promising magnetic field sensors for evaluating the properties of solid materials.
Josephson microwave circuits are essential for the currently flourishing research on superconducting technologies, such as quantum computation, quantum sensing, and microwave signal processing. To increase the possible parameter space for device operation with respect to the current standards, many materials for superconducting circuits are under active investigation. Here, we present the realization of a frequency-tunable, weakly nonlinear Josephson microwave circuit made of the high-temperature cuprate superconductor YBa2Cu3O7 (YBCO), a material with a high critical temperature and a very high critical magnetic field. An in situ frequency-tunability of ∼300 MHz is achieved by integrating a superconducting quantum interference device (SQUID) into the circuit based on Josephson junctions directly written with a helium ion microscope (HIM). Our results demonstrate that YBCO-HIM-SQUID microwave resonators are promising candidates for quantum sensing and microwave technology applications.
Sensitive magnetometers that can operate in high magnetic fields are essential for detecting magnetic resonance signals originating from small ensembles of quantum spins. Such devices have potential applications in quantum technologies, in particular quantum computing. We present a novel experimental setup implementing a differential flux measurement using two Direct-Current Superconducting QUantum Interference Device (DC-SQUID) magnetometers. The differential measurement allows for cancellation of background flux signals while enhancing sample signal. The developed protocol uses pulsed readout, which minimizes on-chip heating since sub-Kelvin temperatures are needed to preserve quantum spin coherence. Results of a proof of concept experiment are shown as well.