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arXiv:2506.20645 · IEEE Transactions on Microwave Theory and Techniques

Reflectionless Filter for Superconducting Quantum Circuits

Jessica Kedziora, Eric Q. Bui, Alec Yen, Andres E. Lombo, Kaidong Peng, Terence J. Weir, Kevin P. O’Brien

Published Oct 27, 2025• 2 citations
arXivHTMLPDF

Abstract

Protecting superconducting quantum circuits from nonideal return loss, including out-of-band circulator behavior, and enhancing the performance of broadband quantum-limited amplifiers can be accomplished using a superconducting version of a special class of microwave filters known as reflectionless filters. These filters can simultaneously permit low passband loss to preserve quantum efficiency and broadband reflectionless characteristics in the stop and pass bands. The filter also suppresses thermal photons emitted in its passband from the termination resistors by the nature of the dual-network topology. This work will review the application, theory, design, and modeling of a superconducting reflectionless filter, followed by fabrication details and the presentation of cryogenic performance measurements of a monolithic device. The filter was fabricated using Al on Si and incorporated NiCr resistors, allowing simple integration with other superconducting quantum devices. The filter with an area of 0.6 mm2achieves insertion loss of$-0.75{\,}\text {dB}$($\sigma = 0.24{\,}\text {dB}$), including its connectorized package over a 80% fractional bandwidth centered at 8 GHz, and 10-dB packaged return loss from dc to above 14.5 GHz.

DOI
10.1109/tmtt.2025.3618989

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Protecting superconducting quantum circuits from nonideal return loss, including out-of-band circulator behavior, and enhancing the performance of broadband quantum-limited amplifiers can be accomplished using a superconducting version of a special class of microwave filters known as reflectionless filters. These filters can simultaneously permit low passband loss to preserve quantum efficiency and broadband reflectionless characteristics in the stop and pass bands. The filter also suppresses thermal photons emitted in its passband from the termination resistors by the nature of the dual-network topology. This work will review the application, theory, design, and modeling of a superconducting reflectionless filter, followed by fabrication details and the presentation of cryogenic performance measurements of a monolithic device. The filter was fabricated using Al on Si and incorporated NiCr resistors, allowing simple integration with other superconducting quantum devices. The filter with an area of 0.6 mm2achieves insertion loss of−0.75 dB-0.75{\,}\text {dB}−0.75dB(σ=0.24 dB\sigma = 0.24{\,}\text {dB}σ=0.24dB), including its connectorized package over a 80% fractional bandwidth centered at 8 GHz, and 10-dB packaged return loss from dc to above 14.5 GHz.
The performance and scalability of superconducting quantum circuits depends critically on the microwave environment. Minimizing signal reflections and suppressing thermal noise are essential for achieving high-fidelity readout and preserving qubit coherence. A significant challenge arises from the use of conventional cryogenic components such as isolators and circulators, which exhibit nonideal out-of-band reflection characteristics. Reflections degrade impedance matching and limit the performance of broadband quantum limited amplifiers. Superconducting implementations of reflectionless microwave filters offer a promising solution to mitigate these issues. The focus of this work is the fabrication and cryogenic characterization of reflectionless filters compatible with superconducting qubit fabrication flows. Devices were implemented on high resistivity silicon substrates using aluminum ground planes, integrated nichrome resistors, and crossovers formed with SiO2 interlayer dielectric. Cryogenic measurements at 20 mK demonstrate high return loss, confirming the viability of these filters for co-fabrication with traveling-wave parametric amplifiers (TWPAs) and circuit quantum electrodynamics (cQED) architectures. The filters exhibit low insertion loss in the passband to maintain quantum measurement efficiency and provide broadband reflection suppression across frequencies relevant to superconducting qubits, offering a scalable way to manage microwave noise in superconducting quantum processors.
A stepped-impedance low-pass filter with integrated hollow waveguide absorbers is presented. The filter combines low insertion loss in the passband with strong attenuation at high frequencies, making it well suited for superconducting quantum computing applications, where qubits are sensitive to both near-band and far out-of-band radiation. The structure is implemented in a rectangular coaxial geometry, with inductive sections coupled to circular hollow waveguides oriented orthogonally to the transmission axis. Above their cutoff frequency, these waveguides efficiently couple to radiation inside the stepped-impedance filter, absorbing energy that would otherwise cause Cooper pair breaking in conventional superconductors. Optimal dimensions were obtained using a differential evolution (DE) algorithm applied to interpolated electromagnetic simulation data. A prototype was fabricated and characterized using a calibrated vector network analyzer (VNA) up to 67 GHz. Measurements confirm a 3-dB cutoff frequency at 13.7 GHz, insertion loss below 0.4 dB for frequencies under 8 GHz, and more than 48.5-dB rejection above 17.3 GHz. The design offers a compact, low-loss solution for near-band filtering and suppression of quasiparticle-generating radiation in cryogenic quantum systems.
With increasing applications of quantum systems operating at high frequencies, the role of integrated microwave components for quantum circuits becomes more and more important. In this article, we present low-temperature superconducting bandpass-bandstop diplexers for a new generation of quantum AC-voltage standards operating at 1 GHz. Based on stringent requirements, the diplexers are designed to provide low passband loss, good stopband rejection, and otherwise a broad ideally matched spectrum with excellent spurious-free performance. A second-order 1 GHz superconducting bandpass-bandstop diplexer is fabricated and characterized for verification. To this end, a cryogenic setup and on-chip calibration standards are implemented for S-parameter measurements. The experimental results exhibit low insertion loss as low as 0.03 dB in the passband section and high rejection in the bandstop branch exceeding 43 dB. Furthermore, the diplexer features wide spurious-free response extending to more than14⋅f014 \cdot \mathrm{f}_{0}14⋅f0​and occupies a very compact area of only1.8mm×1.2mm1.8 \text{mm} \times 1.2 \text{mm}1.8mm×1.2mm.
We report on the design, fabrication and testing of two superconducting passive microwave components, a quadrature hybrid and a 20 dB directional coupler. These components are designed to be integrated with superconducting qubits or Josephson parametric amplifiers and used in quantum information processing applications. For the coupler, we measure return loss and isolation > 20 dB, and insertion loss < 0.3 dB in a 2 GHz band around 6 GHz. For the hybrid performance, we measure isolation > 20 dB and insertion loss < 0.3 dB in a 10% band around 6.5 GHz. These values are within the design specifications of our application; however, we find a 7% difference between the designed and measured center frequency for the hybrid.
We present an efficient fabrication method for absorptive microwave filters based on Eccosorb CR-124. Filters are fabricated from readily available parts, and their cutoff frequency can be set by their length. They exhibit desirable properties such as a very large and deep stop band with rejection beyond 120 dB at least up to 40 GHz, more than 10 dB return loss in both the pass and the stop band, and an error-function shaped step response without overshoot. Measurements at very low temperatures show that the filters thermalize on a time scale of approximately 100 s, and that they can absorb power as high as 100 nW with their noise temperature staying remarkably low, below 100 mK. These properties make the filters ideal for cryogenic filtering and filtering of intermediate frequency port signals of mixers.
An ultra-wide stopband hairpin bandpass filter with integrated nonuniform transmission lines was designed and fabricated for highly sensitive measurements at cryogenic temperatures down to millikelvin and a frequency range of 10 Hz-10 GHz. The scattering matrices of the filter were characterized at T = 4.2 K. The filter provides a stopband from 10 Hz to 2.2 GHz and from 2.3 GHz to 10 GHz with more than 50 dB and 40 dB of amplitude suppression, respectively. The center frequency of the passband is f0 = 2.25 GHz with a bandwidth Δf = 80 MHz. The maximum insertion loss in the passband is 4 dB. The filter has a 50 Ω input and output impedance, SubMiniature version A connector termination, and significantly reduced form factor. The wide stopband frequency range and narrow passband in conjunction with small dimensions make the filter suitable to use it as a part of a high sensitive readout for superconducting quantum circuits, such as superconducting quantum bits and cryogenic parametric amplifiers.