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arXiv:2304.00973 · IEEE Transactions on Applied Superconductivity

Fabrication Development for SPT-SLIM, a Superconducting Spectrometer for Line Intensity Mapping

T. Cecil, Chris Albert, Adam J. Anderson, Peter S. Barry, Bradford A. Benson, C. Cotter, C. L. Chang, M. Dobbs, K. R. Dibert, R. Gualtieri, K. S. Karkare, M. Lisovenko, Daniel P. Marrone, J. Montgomery, Zhaodi Pan, G. Robson, M. Rouble, Erik D. Shirokoff, G. Smecher, Gensheng Wang, Volodymyr G. Yefremenko

Published Apr 3, 2023• 3 citations
arXivHTMLPDF

Abstract

Line Intensity Mapping (LIM) is a new observational technique that uses low-resolution observations of line emission to efficiently trace the large-scale structure of the Universe out to high redshift. Common mm/sub-mm emission lines are accessible from ground-based observatories, and the requirements on the detectors for LIM at mm-wavelengths are well matched to the capabilities of large-format arrays of superconducting sensors. We describe the development of an$ R$=$\lambda / \Delta \lambda = 300$on-chip superconducting filter-bank spectrometer covering the 120–180 GHz band for future mm-LIM experiments, focusing on SPT-SLIM, a pathfinder LIM instrument for the South Pole Telescope. Radiation is coupled from the telescope optical system to the spectrometer chip via an array of feedhorn-coupled orthomode transducers. Superconducting microstrip transmission lines then carry the signal to an array of channelizing half-wavelength resonators, and the output of each spectral channel is sensed by a lumped element kinetic inductance detector (leKID). Key areas of development include incorporating new low-loss dielectrics to improve both the achievable spectral resolution and optical efficiency and development of a robust fabrication process to create a galvanic connection between ultra-pure superconducting thin-films to realize multi-material (hybrid) leKIDs. We provide an overview of the spectrometer design, fabrication process, and prototype devices.

DOI
10.1109/tasc.2023.3259919

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Abstract Superconducting on-chip filter banks provide a scalable, space saving solution to create imaging spectrometers at millimetre and submillimetre wavelengths. We present an easy to realise, lithographed superconducting filter design with a high tolerance to fabrication error. Using a capacitively coupled λ/2\lambda /2λ/2 λ / 2 microstrip resonator to define a narrow ( λ/Δλ=300\lambda /\Delta \lambda = 300λ/Δλ=300 λ / Δ λ = 300 ) spectral pass band, the filtered output of a given spectrometer channel directly connects to a lumped-element kinetic inductance detector. We show the tolerance analysis of our design, demonstrating <11%<11\%<11% < 11 % change in filter quality factor to any one realistic fabrication error and a full filter-bank efficiency forecast to be 50% after accounting for fabrication errors and dielectric loss tangent.
Superconducting integrated circuits (SICs) represent a natural step forward for devices operating at frequencies from microwave up to sub-millimeter wavelengths. They offer massive miniaturization via compact design based on low-loss superconducting transmission lines. At sub-millimeter wavelengths, the development of SICs is driven by astronomical instruments where it could allow the realization of an imaging spectrometer, combining simultaneous imaging and spectroscopy capabilities into a single instrument analogous to integral field units in the infrared and optical regimes. Such an imaging spectrometer can be achieved with SICs by integrating the required elements, such as spectral filters and polarizers, with the detectors onto a single chip. Without this integration, the dispersive system for even a single spatial pixel at these wavelengths would be prohibitively large and could not be realistically scaled up to allow imaging. Astronomical signals are exceedingly weak, typically requiring many nights of exposure to get a good signal to noise ratio. It is therefore imperative that the instrument has minimal losses before its detectors. As a consequence, the losses of each element in the SIC needs to be minimized, which requires careful characterization of the individual elements, including antenna, filters, detectors and connecting transmission lines. The primary focus of this thesis lies on the experimental characterization of the wideband antenna and the low-loss superconducting transmission lines.
Superconducting microwave resonators have the potential to revolutionize submillimeter and far-infrared astronomy, and with it our understanding of the universe. The field of low-temperature detector technology has reached a point where extremely sensitive devices like transition-edge sensors are now capable of detecting radiation limited by the background noise of the universe. However, the size of these detector arrays are limited to only a few thousand pixels. This is because of the cost and complexity of fabricating large-scale arrays of these detectors that can reach up to 10 lithographic levels on chip, and the complicated SQUID-based multiplexing circuitry and wiring for readout of each detector. In order to make substantial progress, next- generation ground-based telescopes such as CCAT or future space telescopes require focal planes with large-scale detector arrays of 104–106 pixels. Arrays using microwave kinetic inductance detectors (MKID) are a potential solution. These arrays can be easily made with a single layer of superconducting metal film deposited on a silicon substrate and pattered using conventional optical lithography. Furthermore, MKIDs are inherently multiplexable in the frequency domain, allowing ∼ 103 detectors to be read out using a single coaxial transmission line and cryogenic amplifier, drastically reducing cost and complexity. An MKID uses the change in the microwave surface impedance of a superconducting thin-film microresonator to detect photons. Absorption of photons in the superconductor breaks Cooper pairs into quasiparticles, changing the complex surface impedance, which results in a perturbation of resonator frequency and quality factor. For excitation and readout, the resonator is weakly coupled to a transmission line. The complex amplitude of a microwave probe signal tuned on-resonance and transmitted on the feedline past the resonator is perturbed as photons are absorbed in the superconductor. The perturbation can be detected using a cryogenic amplifier and subsequent homodyne mixing at room temperature. In an array of MKIDs, all the resonators are coupled to a shared feedline and are tuned to slightly different frequencies. They can be read out simultaneously using a comb of frequencies generated and measured using digital techniques. This thesis documents an effort to demonstrate the basic operation of ∼ 256 pixel arrays of lumped-element MKIDs made from superconducting TiNx on silicon. The resonators are designed and simulated for optimum operation. Various properties of the resonators and arrays are measured and compared to theoretical expectations. A particularly exciting observation is the extremely high quality factors (∼ 3 × 107) of our TiNx resonators which is essential for ultra-high sensitivity. The arrays are tightly packed both in space and in frequency which is desirable for larger full-size arrays. However, this can cause a serious problem in terms of microwave crosstalk between neighboring pixels. We show that by properly designing the resonator geometry, crosstalk can be eliminated; this is supported by our measurement results. We also tackle the problem of excess frequency noise in MKIDs. Intrinsic noise in the form of an excess resonance frequency jitter exists in planar superconducting resonators that are made on dielectric substrates. We conclusively show that this noise is due to fluctuations of the resonator capacitance. In turn, the capacitance fluctuations are thought to be driven by two-level system (TLS) fluctuators in a thin layer on the surface of the device. With a modified resonator design we demonstrate with measurements that this noise can be substantially reduced. An optimized version of this resonator was designed for the multiwavelength submillimeter kinetic inductance camera (MUSIC) instrument for the Caltech Submillimeter Observatory.
Future ground-based cosmic microwave background (CMB) experiments will require more than 10510^5105 polarization sensitive pixels covering multiple atmospheric bands. The scientific potential for such an experiment is impressive; however, the technical challenges are daunting: such an instrument will require square meters of focal plane covered in background limited cryogenic detectors and a dramatic increase in readout capability. We are developing novel kinetic inductance detectors (KIDs) optimized for this purpose. These devices use a twin-slot microwave antenna, superconducting Nb transmission line, and a novel coupling scheme that deposits mm-wavelength power onto a high-resistivity meander deposited as the first layer on a bare Si wafer. This architecture allows us to independently adjust the detector and antenna properties and to pursue multi-band designs. We have fabricated superconducting resonators made from atomic layer deposited (ALD) titanium nitride (TiN), with thicknesses ranging from 3 to 40 nm. We find a strong dependence of transition temperature on thickness, from 0.6 to 4.2 K for our thinnest and thickest films, respectively. In dark measurements, we find internal quality factors that range from 10410^4104 to 7×1057\times 10^57×105 depending on film thickness, and kinetic inductance as high as 8 nH/square. The very small volumes and high kinetic inductance make it possible to engineer extremely sensitive detectors with inductor volumes approaching a few cubic microns that operate at readout frequencies of tens to hundreds of MHz. By taking advantage of the large fractional bandwidth available at low frequencies, we expect to achieve multiplexing densities that exceed that of state of the art TES arrays even without further improvements in film quality factor. We will present the characterization of film properties and dark devices, as well as well as initial optical results for antenna coupled single-band and single-pol devices. We will also discuss designs and sensitivity projections for future dual-pol and multi-band arrays ready for deployment in near-future CMB instruments.
Studying the polarization and spectral distortion of the Cosmic Microwave Background (CMB) in tandem with intensity fluctuations of the Cosmic Infrared Background (CIB) allows us to verify our assumptions on cosmic inflation and investigate the dynamics and evolution of galaxy clusters in the last 10 billion years. Because of its broadband emission and being an all-sky extended source, observing the entire CMB in detail is a very time-consuming and expensive exercise. Fortunately, in the last few years, the on-chip superconducting spectrometer technology has moved out of the lab and into the telescope. With its compact size and background-limited sensitivity, this family of instruments is particularly well-suited for fast and large area observations in a relatively unexplored range of the electromagnetic spectrum. However, recent examples of this technology do not yet reach the requirements needed for large spectroscopic and polarimetric surveys of the CMB. We formulate several of these requirements and introduce novel on-chip components and fabrication techniques. We introduce a cross-over to enable distinguishing signal polarization, minimize signal loss by locally optimized lithography of a coplanar-waveguide (CPW), lower the spectral resolution of microstrip filters by deposition of a dielectric layer, and increase the yield of the spectrometer array by removing individual line shorts. These together have culminated in the successful fabrication of a fourteen-spaxel IFU.
We present an on-chip superconducting filter bank spectrometer based on transition-edge sensors (TES) as a technology for realising a microwave atmospheric sounding instrument with several hundred channels and sky- noise limited performance. Each device consists of a wideband feed coupled to a transmission line filter bank, with a TES behind each filter. In the first instance we have targeted atmospheric temperature sounding using the oxygen (O2) absorption line at 60 GHz, however the device is being scaled to 180 GHz for humidity sounding. The technology developed is also generally applicable to astronomical instrumentation. We have fabricated a set of test devices to demonstrate key device technologies, such as channel placement, spectral resolution and sensitivity. We will describe device design, test configuration and results.