Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

arXiv:2202.04615 · Nature Communications

Ultra-low loss quantum photonic circuits integrated with single quantum emitters

Ashish Chanana, Hugo Larocque, Renan L. Moreira, Jacques Carolan, Biswarup Guha, Emerson Gonçalves de Melo, Vikas Anant, Jin Dong Song, Dirk Englund, Daniel J. Blumenthal, Kartik A. Srinivasan, Marcelo Davanço

Published Dec 12, 2022• 119 citations
arXivHTMLPDF

Abstract

Abstract The scaling of many photonic quantum information processing systems is ultimately limited by the flux of quantum light throughout an integrated photonic circuit. Source brightness and waveguide loss set basic limits on the on-chip photon flux. While substantial progress has been made, separately, towards ultra-low loss chip-scale photonic circuits and high brightness single-photon sources, integration of these technologies has remained elusive. Here, we report the integration of a quantum emitter single-photon source with a wafer-scale, ultra-low loss silicon nitride photonic circuit. We demonstrate triggered and pure single-photon emission into a Si3N4 photonic circuit with ≈ 1 dB/m propagation loss at a wavelength of ≈ 930 nm. We also observe resonance fluorescence in the strong drive regime, showing promise towards coherent control of quantum emitters. These results are a step forward towards scaled chip-integrated photonic quantum information systems in which storing, time-demultiplexing or buffering of deterministically generated single-photons is critical.

DOI
10.1038/s41467-022-35332-z

Related papers

Integrated Quantum Photonics

Iman Esmaeil Zadeh

In the past decades quantum optics has been at the forefront of quantum innovative technologies. For practical applications, scalable platforms for implementation of quantum optical circuits are vital. This thesis presents two new platforms for scalable implementation of quantum optical circuits, namely, modular approach and monolithic integration. Here, we take the first steps towards the integration of three main elements of every quantum optics circuits: Single-photon emitters, single-photon detectors, and quantum logics. Until now, most quantum optical circuits used separate platforms for single-photon generation and detection. The main challenge in the integration of these technologies, which have different requirements, has slowed down the research in the field. Here, we integrate sources and detectors by first fabricating the devices on their own platform and then transferring and combining them together. Plasma enhanced chemical vapor deposition of silicon nitride followed by etching optical waveguides connect these elements. Removing the Poissonian optical excitation field from the quantum circuit is necessary for integration. Classical optical excitation can be avoided if the sources are electrically pumped. However, fabrication of high-quality electrically pumped sources, suitable for integration, has been limited. The experiments described in chapter 4 are our first step towards addressing the mentioned problem. Defect-free nanowires are grown on <100> direction and their optoelectronic performance are characterized. Nanowire quantum dots, thanks to their waveguiding, purity, coherence and their potentials for deterministic integration with other optical circuits, are promising single-photon sources for on-chip quantum optics. However, precise control of the emission energy of the quantum dots by growth has not become possible yet. Chapter 5 describes a method for on-chip tuning of emission energy of nanowire quantum dots using strain fields. We show the emission energy of independent nanowire quantum dots can be brought into degeneracy without affecting their single-photon emission properties. The quantum optical components have to be routed and connected together to form functional circuits. On a chip, this is usually carried out using optical waveguides. Moreover, manipulation of single photons has to be done in a scalable fashion. Again optical waveguides and ring resonators are very good candidates for this task. Therefore, understanding the behavior of these circuits such as their losses, polarization dependence, and temperature behavior is important. The experiment described in chapter 6 studies the behavior of plasma enhanced silicon nitride waveguides in cryogenic temperatures. We concluded in this chapter that due to weak thermo-optic sensitivity of silicon nitride at cryogenic temperatures, the available thermal budget on the system should be carefully considered. An important step in achieving a scalable platform for quantum optical circuits is deterministic and efficient integration of single-photon sources. In chapter 7, we demonstrate successful integration of III-V nanowire quantum dots with silicon nitride waveguides. The nanowires are deterministically selected and transferred from the original growth chip to the new substrate where they are integrated with low-loss silicon nitride waveguides. Our measurements show that the integrated sources preserve their high quality emission properties. In chapter 8, we describe an alternative approach: amodular method for scalable quantum optics. The proposed technique is based on coupling the single-photon from sources into optical fibers where the photons can be processed and then fed into the single-photon detectors. This approach has high flexibility and is easier to implement but as described in the chapter, at the moment, losses in the interfaces between optical fibers and single-photon sources are a major limiting factor. We conclude the thesis with some possible future directions and exciting new results on integration of single-photon detectors with sources and waveguides. Finally, primary results on on-chip single-photon filtering and removal of the optical excitation field are demonstrated.

•Jan 1, 2016•0 citations

Waveguide Coupled Resonance Fluorescence from On-Chip Quantum Emitter

M. N. Makhonin, J. Dixon, R. J. Coles +6 more

Resonantly driven quantum emitters offer a very promising route to obtain highly coherent sources of single photons required for applications in quantum information processing (QIP). Realizing this for on-chip scalable devices would be important for scientific advances and practical applications in the field of integrated quantum optics. Here we report on-chip quantum dot (QD) resonance fluorescence (RF) efficiently coupled into a single-mode waveguide, a key component of a photonic integrated circuit, with a negligible resonant laser background and show that the QD coherence is enhanced by more than a factor of 4 compared to off-resonant excitation. Single-photon behavior is confirmed under resonant excitation, and fast fluctuating charge dynamics are revealed in autocorrelation g((2)) measurements. The potential for triggered operation is verified in pulsed RF. These results pave the way to a novel class of integrated quantum-optical devices for on-chip quantum information processing with embedded resonantly driven quantum emitters.

Nano Letters•Nov 10, 2014•95 citations

An ultralow-loss integrated photonic platform for discrete-variable quantum information processing

Ruiyang Chen, Zeying Zhong, Sanli Huang +9 more

Photonic integrated circuits offer a scalable and robust route toward quantum information technologies by consolidating photon sources and linear optical networks onto compact, wafer-manufacturable chips. Although silicon photonics has enabled diverse discrete-variable quantum breakthroughs -- spanning multiphoton entanglement, quantum networking, and photonic qubit fusion for quantum computing -- scaling these platforms beyond proof-of-principle demonstrations remains severely constrained by a critical system-level bottleneck. Optical loss compounds rapidly across photon generation, routing, and state analysis, causing multiphoton generation probabilities to plummet exponentially as circuit depth and complexity grow. Here we overcome this rate-loss barrier by demonstrating a monolithic, ultralow-loss silicon nitride (Si$_3$N$_4$) integrated photonic platform engineered for high-performance discrete-variable quantum information processing. Our architecture seamlessly integrates narrowband photon-pair sources with low-loss qubit-fusion circuits and reconfigurable state-analysis interferometers. The on-chip sources prepare Einstein-Podolsky-Rosen (EPR) states with a fidelity of 0.9875(3) and exhibit near-unity photon indistinguishability, yielding a heralded Hong-Ou-Mandel interference visibility of 0.990(6). By executing on-chip fusion of two EPR states, we synthesize and characterize four-photon Greenberger-Horne-Zeilinger states with a record fidelity of 0.943(8) and a fourfold count rate of 27 Hz -- more than two orders of magnitude higher than previous silicon-photonic implementations. Combined with standard CMOS-compatible fabrication on 150-mm-diameter wafers, these results establish ultralow-loss Si$_3$N$_4$ integrated photonics as a definitive, manufacturable platform for deployable, large-scale quantum information processors.

quant-pharXiv:2606.26910•Jun 26, 2026•0 citations

On-Chip Hong–Ou–Mandel Interference from Separate Quantum Dot Emitters in an Integrated Circuit

Łukasz Dusanowski, Dominik Köck, Christian Schneider +1 more

Scalable quantum photonic technologies require the low-loss integration of many identical single-photon sources with photonic circuitry on a chip. Relatively complex quantum photonic circuits have already been demonstrated; however, sources used so far relied on parametric down-conversion which has a probabilistic nature that intrinsically limits its efficiency and scalability. Quantum emitter-based single-photon sources are free of this limitation, but frequency matching of multiple emitters within a single circuit remains challenging. In this work, we demonstrate a key component in this regard in the form of a fully monolithic GaAs circuit combining two frequency-matched quantum dot single-photon sources interconnected with a low-loss on-chip beamsplitter connected via single-mode ridge waveguides. This device enabled us to perform a two-photon interference experiment on-chip with a visibility reaching 66%. Our device could be further scaled up, providing a clear path to increasing the complexity of quantum circuits toward fully scalable integrated quantum technologies.

arXiv:2301.01706•ACS Photonics•Jun 21, 2023•27 citations

High-speed thin-film lithium niobate quantum processor driven by a solid-state quantum emitter

Patrik Isene Sund, Emma Lomonte, Stefano Paesani +9 more

Scalable photonic quantum computing architectures pose stringent requirements on photonic processing devices. The need for low-loss high-speed reconfigurable circuits and near-deterministic resource state generators are some of the most challenging requirements. Here we develop an integrated photonic platform based on thin-film lithium niobate and interface it with deterministic solid-state single-photon sources based on quantum dots in nanophotonic waveguides. The generated photons are processed with low-loss circuits programmable at speeds of several GHz. We realize a variety of key photonic quantum information processing functionalities with the high-speed circuits, including on-chip quantum interference, photon demultiplexing, and reprogrammability of a four-mode universal photonic circuit. These results show a promising path forward for scalable photonic quantum technologies by merging integrated photonics with solid-state deterministic photon sources in a heterogeneous approach to scaling up.

arXiv:2211.05703•Nov 10, 2022•1 citation

High-speed thin-film lithium niobate quantum processor driven by a solid-state quantum emitter

Patrik Isene Sund, Emma Lomonte, Stefano Paesani +9 more

Scalable photonic quantum computing architectures pose stringent requirements on photonic processing devices. The needs for low-loss high-speed reconfigurable circuits and near-deterministic resource state generators are some of the most challenging requirements. Here, we develop an integrated photonic platform based on thin-film lithium niobate and interface it with deterministic solid-state single-photon sources based on quantum dots in nanophotonic waveguides. The generated photons are processed with low-loss circuits programmable at speeds of several gigahertz. We realize a variety of key photonic quantum information processing functionalities with the high-speed circuits, including on-chip quantum interference, photon demultiplexing, and reprogrammability of a four-mode universal photonic circuit. These results show a promising path forward for scalable photonic quantum technologies by merging integrated photonics with solid-state deterministic photon sources in a heterogeneous approach to scaling up.

Science Advances•May 12, 2023•67 citations
Abstract The scaling of many photonic quantum information processing systems is ultimately limited by the flux of quantum light throughout an integrated photonic circuit. Source brightness and waveguide loss set basic limits on the on-chip photon flux. While substantial progress has been made, separately, towards ultra-low loss chip-scale photonic circuits and high brightness single-photon sources, integration of these technologies has remained elusive. Here, we report the integration of a quantum emitter single-photon source with a wafer-scale, ultra-low loss silicon nitride photonic circuit. We demonstrate triggered and pure single-photon emission into a Si3N4 photonic circuit with ≈ 1 dB/m propagation loss at a wavelength of ≈ 930 nm. We also observe resonance fluorescence in the strong drive regime, showing promise towards coherent control of quantum emitters. These results are a step forward towards scaled chip-integrated photonic quantum information systems in which storing, time-demultiplexing or buffering of deterministically generated single-photons is critical.
In the past decades quantum optics has been at the forefront of quantum innovative technologies. For practical applications, scalable platforms for implementation of quantum optical circuits are vital. This thesis presents two new platforms for scalable implementation of quantum optical circuits, namely, modular approach and monolithic integration. Here, we take the first steps towards the integration of three main elements of every quantum optics circuits: Single-photon emitters, single-photon detectors, and quantum logics. Until now, most quantum optical circuits used separate platforms for single-photon generation and detection. The main challenge in the integration of these technologies, which have different requirements, has slowed down the research in the field. Here, we integrate sources and detectors by first fabricating the devices on their own platform and then transferring and combining them together. Plasma enhanced chemical vapor deposition of silicon nitride followed by etching optical waveguides connect these elements. Removing the Poissonian optical excitation field from the quantum circuit is necessary for integration. Classical optical excitation can be avoided if the sources are electrically pumped. However, fabrication of high-quality electrically pumped sources, suitable for integration, has been limited. The experiments described in chapter 4 are our first step towards addressing the mentioned problem. Defect-free nanowires are grown on <100> direction and their optoelectronic performance are characterized. Nanowire quantum dots, thanks to their waveguiding, purity, coherence and their potentials for deterministic integration with other optical circuits, are promising single-photon sources for on-chip quantum optics. However, precise control of the emission energy of the quantum dots by growth has not become possible yet. Chapter 5 describes a method for on-chip tuning of emission energy of nanowire quantum dots using strain fields. We show the emission energy of independent nanowire quantum dots can be brought into degeneracy without affecting their single-photon emission properties. The quantum optical components have to be routed and connected together to form functional circuits. On a chip, this is usually carried out using optical waveguides. Moreover, manipulation of single photons has to be done in a scalable fashion. Again optical waveguides and ring resonators are very good candidates for this task. Therefore, understanding the behavior of these circuits such as their losses, polarization dependence, and temperature behavior is important. The experiment described in chapter 6 studies the behavior of plasma enhanced silicon nitride waveguides in cryogenic temperatures. We concluded in this chapter that due to weak thermo-optic sensitivity of silicon nitride at cryogenic temperatures, the available thermal budget on the system should be carefully considered. An important step in achieving a scalable platform for quantum optical circuits is deterministic and efficient integration of single-photon sources. In chapter 7, we demonstrate successful integration of III-V nanowire quantum dots with silicon nitride waveguides. The nanowires are deterministically selected and transferred from the original growth chip to the new substrate where they are integrated with low-loss silicon nitride waveguides. Our measurements show that the integrated sources preserve their high quality emission properties. In chapter 8, we describe an alternative approach: amodular method for scalable quantum optics. The proposed technique is based on coupling the single-photon from sources into optical fibers where the photons can be processed and then fed into the single-photon detectors. This approach has high flexibility and is easier to implement but as described in the chapter, at the moment, losses in the interfaces between optical fibers and single-photon sources are a major limiting factor. We conclude the thesis with some possible future directions and exciting new results on integration of single-photon detectors with sources and waveguides. Finally, primary results on on-chip single-photon filtering and removal of the optical excitation field are demonstrated.
Resonantly driven quantum emitters offer a very promising route to obtain highly coherent sources of single photons required for applications in quantum information processing (QIP). Realizing this for on-chip scalable devices would be important for scientific advances and practical applications in the field of integrated quantum optics. Here we report on-chip quantum dot (QD) resonance fluorescence (RF) efficiently coupled into a single-mode waveguide, a key component of a photonic integrated circuit, with a negligible resonant laser background and show that the QD coherence is enhanced by more than a factor of 4 compared to off-resonant excitation. Single-photon behavior is confirmed under resonant excitation, and fast fluctuating charge dynamics are revealed in autocorrelation g((2)) measurements. The potential for triggered operation is verified in pulsed RF. These results pave the way to a novel class of integrated quantum-optical devices for on-chip quantum information processing with embedded resonantly driven quantum emitters.
Photonic integrated circuits offer a scalable and robust route toward quantum information technologies by consolidating photon sources and linear optical networks onto compact, wafer-manufacturable chips. Although silicon photonics has enabled diverse discrete-variable quantum breakthroughs -- spanning multiphoton entanglement, quantum networking, and photonic qubit fusion for quantum computing -- scaling these platforms beyond proof-of-principle demonstrations remains severely constrained by a critical system-level bottleneck. Optical loss compounds rapidly across photon generation, routing, and state analysis, causing multiphoton generation probabilities to plummet exponentially as circuit depth and complexity grow. Here we overcome this rate-loss barrier by demonstrating a monolithic, ultralow-loss silicon nitride (Si3_33​N4_44​) integrated photonic platform engineered for high-performance discrete-variable quantum information processing. Our architecture seamlessly integrates narrowband photon-pair sources with low-loss qubit-fusion circuits and reconfigurable state-analysis interferometers. The on-chip sources prepare Einstein-Podolsky-Rosen (EPR) states with a fidelity of 0.9875(3) and exhibit near-unity photon indistinguishability, yielding a heralded Hong-Ou-Mandel interference visibility of 0.990(6). By executing on-chip fusion of two EPR states, we synthesize and characterize four-photon Greenberger-Horne-Zeilinger states with a record fidelity of 0.943(8) and a fourfold count rate of 27 Hz -- more than two orders of magnitude higher than previous silicon-photonic implementations. Combined with standard CMOS-compatible fabrication on 150-mm-diameter wafers, these results establish ultralow-loss Si3_33​N4_44​ integrated photonics as a definitive, manufacturable platform for deployable, large-scale quantum information processors.
Scalable quantum photonic technologies require the low-loss integration of many identical single-photon sources with photonic circuitry on a chip. Relatively complex quantum photonic circuits have already been demonstrated; however, sources used so far relied on parametric down-conversion which has a probabilistic nature that intrinsically limits its efficiency and scalability. Quantum emitter-based single-photon sources are free of this limitation, but frequency matching of multiple emitters within a single circuit remains challenging. In this work, we demonstrate a key component in this regard in the form of a fully monolithic GaAs circuit combining two frequency-matched quantum dot single-photon sources interconnected with a low-loss on-chip beamsplitter connected via single-mode ridge waveguides. This device enabled us to perform a two-photon interference experiment on-chip with a visibility reaching 66%. Our device could be further scaled up, providing a clear path to increasing the complexity of quantum circuits toward fully scalable integrated quantum technologies.
Scalable photonic quantum computing architectures pose stringent requirements on photonic processing devices. The need for low-loss high-speed reconfigurable circuits and near-deterministic resource state generators are some of the most challenging requirements. Here we develop an integrated photonic platform based on thin-film lithium niobate and interface it with deterministic solid-state single-photon sources based on quantum dots in nanophotonic waveguides. The generated photons are processed with low-loss circuits programmable at speeds of several GHz. We realize a variety of key photonic quantum information processing functionalities with the high-speed circuits, including on-chip quantum interference, photon demultiplexing, and reprogrammability of a four-mode universal photonic circuit. These results show a promising path forward for scalable photonic quantum technologies by merging integrated photonics with solid-state deterministic photon sources in a heterogeneous approach to scaling up.
Scalable photonic quantum computing architectures pose stringent requirements on photonic processing devices. The needs for low-loss high-speed reconfigurable circuits and near-deterministic resource state generators are some of the most challenging requirements. Here, we develop an integrated photonic platform based on thin-film lithium niobate and interface it with deterministic solid-state single-photon sources based on quantum dots in nanophotonic waveguides. The generated photons are processed with low-loss circuits programmable at speeds of several gigahertz. We realize a variety of key photonic quantum information processing functionalities with the high-speed circuits, including on-chip quantum interference, photon demultiplexing, and reprogrammability of a four-mode universal photonic circuit. These results show a promising path forward for scalable photonic quantum technologies by merging integrated photonics with solid-state deterministic photon sources in a heterogeneous approach to scaling up.