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arXiv:1303.6381 · Optics Express

High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler

Shigehito Miki, Taro Yamashita, Hirotaka Terai, Zhen Wang

Published Apr 17, 2013• 189 citations
arXivHTMLPDF

Abstract

We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. The best device showed a system detection efficiency (DE) of 74%, dark count rate of 100 c/s, and full width at half maximum timing jitter of 68 ps under a bias current of 18.0 μA with a practical Gifford-McMahon cryocooler system. We also introduced six detectors into the cryocooler and confirmed that the system DE of all detectors was higher than 67% at the dark count rate of 100 c/s.

DOI
10.1364/oe.21.010208

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We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. The best device showed a system detection efficiency (DE) of 74%, dark count rate of 100 c/s, and full width at half maximum timing jitter of 68 ps under a bias current of 18.0 μA with a practical Gifford-McMahon cryocooler system. We also introduced six detectors into the cryocooler and confirmed that the system DE of all detectors was higher than 67% at the dark count rate of 100 c/s.
We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. By applying a double sided cavity structure, simulated absorptance in the nanowire meander reached 97% at 1550 nm wavelength. The fabricated device showed a system detection efficiency (DE) of 74% at 1550 nm, dark count rate of 100 c/s, and a full width at half maximum timing jitter of 68 ps under a bias current of 18.0 μA with a practical Gifford-McMahon cryocooler system.
We have developed a practical superconducting nanowire single photon detector (SNSPD) system with our superconducting thin films and devices fabrication, optical coupling packaging, and cryogenic technology. The SNSPD devices were fabricated from high-quality niobium nitride (NbN) ultra-thin films that were epitaxially grown on single-crystal MgO substrates, and optical cavity structure were applied for improvement of photo absorption efficiency. The SNSPD system was developed based on a compact Gifford-McMahon (GM) cryocooler, in which SNSPD can operate continuously at temperature of 2.9 K +/- 10 mK with low power consumption without any liquid cryogens. The system detection efficiencies at 1550 nm wavelength (at a 100 Hz dark count rate) were found to be 2.6% for device without optical cavity and 21% for device with optical cavity. The response speed of devices showed maximally 200 MHz with 5 × 5 mm square device, and timing jitter of 100 ps full width at a half maximum (FWHM) was observed.
Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 μm× 30 μm.To achieve non-constricted detectors,we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide Nb N nanowires with a fill factor of 50%.The devices showed 72.4% system detection efficiency(SDE) at 100-Hz dark count rate(DCR) and 74-ps timing jitter,measured at the fiber communication wavelength of 1550 nm.The highest SDE which is 81.2% when the DCR is ～ 700 c/s appears at the wavelength of 1650 nm.
Recent progress in the development of superconducting nanowire single photon detectors (SSPD or SNSPD) has delivered excellent performance, and has had a great impact on a range of research fields. Significant efforts are being made to further improve the technology, and a primary concern remains to resolve the trade-offs between detection efficiency (DE), timing jitter, and response speed. We present a stable and high-performance fiber-coupled niobium titanium nitride superconducting nanowire avalanche photon detector (SNAP) that resolves these trade-offs. Autocorrelation function measurement revealed an afterpulse-free operation in serially connected two SNAP (SC-2SNAP), even in the absence of a choke inductor, achieving a 7.65 times faster response speed than standard SSPDs. The SC-2SNAP device showed a system detection efficiency (SDE) of 81.0% with wide bias current margin, a dark count rate of 6.8 counts/s, and full width at half maximum timing jitter of 68 ps, operating in a practical Gifford-McMahon cryocooler system.
Shortly after their inception, superconducting nanowire single-photon detectors (SNSPDs) became the leading quantum light detection technology. With the capability of detecting single-photons with near-unity efficiency, high time resolution, low dark count rate, and fast recovery time, SNSPDs outperform conventional single-photon detection techniques. However, detecting lower energy single-photons (<0.8 eV) with high efficiency and low timing jitter has remained a challenge. To achieve unity internal efficiency at mid-infrared wavelengths, previous works used amorphous superconducting materials with low energy gaps at the expense of reduced time resolution (close to a nanosecond), and by operating them in complex mK dilution refrigerators. In this work, we provide an alternative approach with SNSPDs fabricated from 5-9.5 nm thick NbTiN superconducting films and devices operated in conventional Gifford-McMahon (GM) cryocoolers. By optimizing the superconducting film deposition process, film thickness and nanowire design, our fiber-coupled devices achieved > 70% system detection efficiency (SDE) at 2 μm and sub-15 ps timing jitter. Furthermore, detectors from the same batch demonstrated unity internal detection efficiency at 3 μm and 80% internal efficiency at 4 μm, paving the road for an efficient mid-infrared single-photon detection technology with unparalleled time resolution and without mK cooling requirements.
Single-photon detection with high efficiency, high time resolution, low dark counts, and high photon detection rates is crucial for a wide range of optical measurements. Although efficient detectors have been reported before, combining all performance parameters in a single device remains a challenge. Here, we show a broadband NbTiN superconducting nanowire detector with an efficiency exceeding 92%, over 150 MHz photon detection rate, and a dark count rate below 130 Hz operated in a Gifford-McMahon cryostat. Furthermore, with careful optimization of the detector design and readout electronics, we reach an ultra-low system timing jitter of 14.80 ps (13.95 ps decoupled) while maintaining high detection efficiencies (>75%).